scholarly journals Influence of oxygen fraction on the characteristics of titanium oxide coatings obtained by the magnetron method

2021 ◽  
Vol 2124 (1) ◽  
pp. 012025
Author(s):  
V S Vashchilin ◽  
E V Krivinozhko ◽  
L S Sabitov ◽  
S V Trukhanov ◽  
L KH-A Saipova
Keyword(s):  
Titanium Oxide ◽  
Discharge Plasma ◽  
Arc Discharge ◽  
Columnar Structure ◽  
Vacuum Arc ◽  
Oxide Coatings ◽  
Oxygen Fraction ◽  
Vacuum Radiation ◽  
Radiation Annealing

Abstract Titanium oxide coatings were obtained by magnetron sputtering on a glass substrate with different oxygen fraction in the plasma. Studies were carried out by scanning electron microscopy of the obtained coating samples establishing the role of oxygen in the process of crystallization of TiOx-coatings. It was found that with increasing the oxygen fraction in the vacuum arc discharge plasma the crystal grain size increases, the time of coating on the substrate increases, and the crystal layer has a columnar structure. The presence of amorphous and crystalline phase for all coating samples was revealed, with the predominance of the former. On the surface microphotographs of the coatings microcraters were found, on the surface of the samples obtained at the concentration of O2 in the plasma 14% of their concentration is maximum, this can be explained by changes in the state of the plasma, starting to occur at this concentration of reaction gas. Vacuum photonic annealing of the obtained coatings was performed. Vacuum radiation annealing in the furnace led to modification of coatings: sintering of coatings, increase of their crystallinity. An increase in crystallite size in a sample with an oxygen fraction of 12% was detected.

scholarly journals Research and development of anti-adhesive coatings deposited by vacuum-arc discharge plasma

2018 ◽  
Vol 1115 ◽  
pp. 032049
Author(s):  
A Pesin ◽  
D Pustovoytov ◽  
R Vafin ◽  
E L Vardanyan ◽  
A Asylbaev ◽  
...  
Keyword(s):  
Research And Development ◽  
Discharge Plasma ◽  
Arc Discharge ◽  
Vacuum Arc

scholarly journals The behavior dynamics of a droplet phase in vacuum arc discharge plasma in chemically active gas nitrogen

2017 ◽  
Vol 6 (3) ◽  
pp. 284-288 ◽  
Author(s):  
Valentin Ye. Panarin ◽  
Nikolay Ye. Svavil’ny ◽  
Anastasiya I. Khominich
Keyword(s):  
Discharge Plasma ◽  
Arc Discharge ◽  
Vacuum Arc ◽  
Behavior Dynamics ◽  
Droplet Phase

On a mechanism of ion acceleration in vacuum arc-discharge plasma

2001 ◽  
Vol 46 (5) ◽  
pp. 307-309 ◽  
Author(s):  
G. Yu. Yushkov ◽  
A. S. Bugaev ◽  
I. A. Krinberg ◽  
E. M. Oks
Keyword(s):  
Discharge Plasma ◽  
Arc Discharge ◽  
Vacuum Arc ◽  
Ion Acceleration

scholarly journals Measurement of the expansion velocity of the plasma high-current vacuum arc discharge

2021 ◽  
Vol 2064 (1) ◽  
pp. 012005
Author(s):  
A S Zhigalin ◽  
A G Rousskikh ◽  
V I Oreshkin ◽  
A P Artyomov
Keyword(s):  
Discharge Plasma ◽  
Streak Camera ◽  
Arc Discharge ◽  
Vacuum Arc ◽  
Expansion Velocity ◽  
High Current ◽  
Plasma Expansion ◽  
Plasma Gun ◽  
Axis Of Symmetry ◽  
Plasma Guns

Abstract In this work, we present experimental results on measuring the velocity of vacuum arc discharge plasma expansion. In the experiments, two designs of plasma guns were used. In the first version, the end of the arc discharge cathode was located below the plane of the anode, and the surface of the insulator separating them was parallel to the axis of symmetry of the plasma gun. In this design, the arc discharge plasma escapes the anode through a hole, the diameter of which coincides with the diameter of the cathode. In the second variant, the plane of the end face of the arc discharge cathode coincided with the plane of the anode, and the surface of the insulator separating them was located perpendicular to the axis of symmetry of the plasma gun. To obtain an image of plasma in the optical range, an FER-7 optical streak camera was used. Based on the results obtained, it can be concluded that the expansion velocity of the plasma of a high-current vacuum arc discharge does not depend on the design of the guns considered in this experiment.

scholarly journals Formation of catalytic and corrosion protective layers with use of ion beam assisted deposition of metals from vacuum arc discharge plasma

2021 ◽  
Vol 2064 (1) ◽  
pp. 012054
Author(s):  
V V Poplavsky ◽  
A V Dorozhko ◽  
V G Matys
Keyword(s):  
Discharge Plasma ◽  
Arc Discharge ◽  
Ion Beam ◽  
Substrate Surface ◽  
Ion Source ◽  
Vacuum Arc ◽  
Corrosion Properties ◽  
Ion Beam Assisted Deposition ◽  
Deposited Metal ◽  
Catalytically Active

Abstract This paper presents a brief overview of our studies on the modification of materials using ion beam assisted deposition (IBAD) of metals from vacuum arc discharge plasma in order to form catalytically active and corrosion-resistant layers on the surface. Deposition of metals on different materials with simultaneous mixing of the deposited layer with the substrate surface by accelerated ions of the deposited metal was carried out in an experimental setup with a pulsed electric arc ion source. Catalytic and corrosion properties of the materials with the obtained layers were studied using electrochemical voltammetric measurements. The microstructure and composition of the resulting layers were studied using the SEM, EDX, WD-XRF, XPS, EBSD, and RBS methods.

Plasmachemical synthesis of aluminum-based nitride compounds in vacuum-arc discharge plasma

2012 ◽  
Vol 38 (10) ◽  
pp. 938-940 ◽  
Author(s):  
Yu. A. Bystrov ◽  
N. Z. Vetrov ◽  
A. A. Lisenkov
Keyword(s):  
Discharge Plasma ◽  
Arc Discharge ◽  
Vacuum Arc ◽  
Plasmachemical Synthesis
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