ScienceGate
Advanced Search
Author Search
Journal Finder
Blog
Sign in / Sign up
ScienceGate
Search
Author Search
Journal Finder
Blog
Sign in / Sign up
Growth of Aluminum Nitride on a Silicon Nitride Substrate for Hybrid Photonic Circuits
Materials for Quantum Technology
◽
10.1088/2633-4356/ac08ed
◽
2021
◽
Author(s):
Giulio Terrasanta
◽
Manuel Müller
◽
Timo Sommer
◽
Stephan Gepraegs
◽
Rudolf Gross
◽
...
Keyword(s):
Silicon Nitride
◽
Aluminum Nitride
◽
Photonic Circuits
Download Full-text
Related Documents
Cited By
References
Hybrid Aluminum Nitride Integration on Silicon Nitride Photonic Circuits
10.1364/cleo_si.2021.sf2a.2
◽
2021
◽
Author(s):
Giulio Terrasanta
◽
Manuel Müller
◽
Timo Sommer
◽
Matthias Althammer
◽
Menno Poot
Keyword(s):
Silicon Nitride
◽
Aluminum Nitride
◽
Photonic Circuits
Download Full-text
Aluminum nitride integration on silicon nitride photonic circuits: a new hybrid approach towards on-chip nonlinear optics
Optics Express
◽
10.1364/oe.445465
◽
2021
◽
Author(s):
Giulio Terrasanta
◽
Timo Sommer
◽
Manuel Müller
◽
Matthias Althammer
◽
Rudolf Grosse
◽
...
Keyword(s):
Silicon Nitride
◽
Nonlinear Optics
◽
Aluminum Nitride
◽
Hybrid Approach
◽
Photonic Circuits
◽
On Chip
Download Full-text
Wafer-scale fabrication of ultralow-loss silicon nitride nonlinear photonic circuits
Asia Communications and Photonics Conference/International Conference on Information Photonics and Optical Communications 2020 (ACP/IPOC)
◽
10.1364/acpc.2020.t4d.1
◽
2020
◽
Cited By ~ 2
Author(s):
Junqiu Liu
◽
Jijun He
◽
Rui Ning Wang
◽
Guanhao Huang
◽
A. S. Raja
◽
...
Keyword(s):
Silicon Nitride
◽
Photonic Circuits
◽
Wafer Scale
Download Full-text
Silicon-nitride waveguide-based integrated photonic circuits for medical diagnostic and other sensing applications
Smart Photonic and Optoelectronic Integrated Circuits XXI
◽
10.1117/12.2509982
◽
2019
◽
Cited By ~ 2
Author(s):
Rainer Hainberger
◽
Paul Muellner
◽
Stefan Nevlacsil
◽
Alejandro Maese-Novo
◽
Florian Vogelbacher
◽
...
Keyword(s):
Silicon Nitride
◽
Photonic Circuits
◽
Sensing Applications
◽
Medical Diagnostic
Download Full-text
Van der Waals and Graphene-Like Layers of Silicon Nitride and Aluminum Nitride
2D Materials
◽
10.5772/intechopen.81775
◽
2019
◽
Cited By ~ 2
Author(s):
Vladimir G. Mansurov
◽
Yurij G. Galitsyn
◽
Timur V. Malin
◽
Sergey A. Teys
◽
Konstantin S. Zhuravlev
◽
...
Keyword(s):
Silicon Nitride
◽
Aluminum Nitride
◽
Van Der Waals
Download Full-text
Exposure of Tantalum Carbide, Silicon Nitride and Aluminum Nitride to Chlorine Trifluoride Gas
ECS Journal of Solid State Science and Technology
◽
10.1149/2.0031903jss
◽
2019
◽
Vol 8
(3)
◽
pp. P175-P179
◽
Cited By ~ 4
Author(s):
Miyu Haruguchi
◽
Ryohei Kawasaki
◽
Hitoshi Habuka
◽
Yoshinao Takahashi
Keyword(s):
Silicon Nitride
◽
Aluminum Nitride
◽
Tantalum Carbide
Download Full-text
Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip [Invited]
Photonics Research
◽
10.1364/prj.3.000b47
◽
2015
◽
Vol 3
(5)
◽
pp. B47
◽
Cited By ~ 94
Author(s):
Ananth Z. Subramanian
◽
Eva Ryckeboer
◽
Ashim Dhakal
◽
Frédéric Peyskens
◽
Aditya Malik
◽
...
Keyword(s):
Silicon Nitride
◽
Photonic Circuits
Download Full-text
Design and fabrication of zero-group-velocity Lamb wave resonator onto silicon nitride/aluminum nitride suspended membrane
10.1063/1.5047767
◽
2018
◽
Cited By ~ 2
Author(s):
Cinzia Caliendo
◽
Ennio Giovine
◽
Muhammad Hamidullah
Keyword(s):
Silicon Nitride
◽
Aluminum Nitride
◽
Group Velocity
◽
Lamb Wave
◽
Wave Resonator
◽
Suspended Membrane
◽
Zero Group
Download Full-text
Reactivity of Aluminum Nitride Powder in Aqueous Silicon Nitride and Silicon Carbide Slurries
Journal of the American Ceramic Society
◽
10.1111/j.1151-2916.2002.tb00117.x
◽
2004
◽
Vol 85
(2)
◽
pp. 484-486
◽
Cited By ~ 6
Author(s):
Kristoffer Krnel
◽
Tomaž Kosma[c-breve]
Keyword(s):
Silicon Carbide
◽
Silicon Nitride
◽
Aluminum Nitride
◽
Nitride Powder
◽
Aqueous Silicon
Download Full-text
Low-Loss, Silicon Integrated, Aluminum Nitride Photonic Circuits and Their Use for Electro-Optic Signal Processing
Nano Letters
◽
10.1021/nl3011885
◽
2012
◽
Vol 12
(7)
◽
pp. 3562-3568
◽
Cited By ~ 137
Author(s):
Chi Xiong
◽
Wolfram H. P. Pernice
◽
Hong X. Tang
Keyword(s):
Signal Processing
◽
Aluminum Nitride
◽
Low Loss
◽
Photonic Circuits
◽
Electro Optic
Download Full-text
Sign in / Sign up
Close
Export Citation Format
Close
Share Document
Close