AbstractThe formation of superconducting thin films on lanthanum aluminate substrates is very important for high‐frequency applications. In this paper, we discuss the fabrication of epitaxial superconducting YBa2Cu3O7 thin films on (100)LaAlO3 substrates, which exhibit excellent dielectric properties required for high frequency applications. The films were deposited by the biased pulsed laser evaporation technique (PLE) at substrate temperatures between 500‐650°C and exhibit excellent crystallinity with best minimum ion channeling yields corresponding to approximately 3%. The superconducting transition temperatures varied from 88‐92 K with critical current densities at 77K and zero magnetic field greater than 4 ‐ 5 x 106 Amps/cm2.
