scholarly journals Space-charge effects in high brightness electron beam emittance measurements

2002 ◽  
Vol 5 (1) ◽  
Author(s):  
S. G. Anderson ◽  
J. B. Rosenzweig ◽  
G. P. LeSage ◽  
J. K. Crane
Keyword(s):  
Electron Beam ◽  
Space Charge ◽  
Space Charge Effects ◽  
Beam Emittance ◽  
Charge Effects ◽  
High Brightness

Crossed Electron Beam Technique for Measuring Space‐Charge Effects in Beams

1954 ◽  
Vol 25 (5) ◽  
pp. 679-680
Author(s):  
Paul D. Coleman ◽  
Murray D. Sirkis ◽  
Irving Kaufman
Keyword(s):  
Electron Beam ◽  
Space Charge ◽  
Space Charge Effects ◽  
Charge Effects ◽  
Beam Technique ◽  
Measuring Space

Global space charge effects in high-throughput electron-beam lithography

1999 ◽  
Author(s):  
Liqun Han ◽  
W. D. Meisburger ◽  
Roger Fabian W. Pease ◽  
Gil I. Winograd
Keyword(s):  
Electron Beam ◽  
Space Charge ◽  
High Throughput ◽  
Electron Beam Lithography ◽  
Space Charge Effects ◽  
Charge Effects ◽  
Global Space
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