Finite element eddy current analysis in RF plasma devices with metal cooling system
Keyword(s):
2016 ◽
Vol 52
(3)
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pp. 1-4
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Keyword(s):
1996 ◽
Vol 32
(3)
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pp. 741-744
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Keyword(s):
2004 ◽
Vol 40
(2)
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pp. 993-996
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Keyword(s):
Generating Source Field Functions With Limited Support for Edge Finite-Element Eddy Current Analysis
2007 ◽
Vol 43
(4)
◽
pp. 1165-1168
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1988 ◽
Vol 24
(6)
◽
pp. 3174-3176
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