Finite element eddy current analysis in RF plasma devices with metal cooling system

1997 ◽  
Vol 33 (2) ◽  
pp. 2195-2198
Author(s):  
M.R. Mckideche ◽  
M. Feliachi ◽  
G. Develey ◽  
K. Srairi
2016 ◽  
Vol 52 (3) ◽  
pp. 1-4 ◽  
Author(s):  
Junichi Niimi ◽  
Takeshi Mifune ◽  
Tetsuji Matsuo

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