scholarly journals Review of Recent Progress on Silicon Nitride-Based Photonic Integrated Circuits

IEEE Access ◽  
2020 ◽  
Vol 8 ◽  
pp. 195436-195446
Author(s):  
Tarun Sharma ◽  
Jiaqi Wang ◽  
Brajesh Kumar Kaushik ◽  
Zhenzhou Cheng ◽  
Roshan Kumar ◽  
...  
Author(s):  
Jeroen Goyvaerts ◽  
Sulakshna Kumari ◽  
Sarah Uvin ◽  
Jing Zhang ◽  
Roel Baets ◽  
...  

2019 ◽  
Vol 220 ◽  
pp. 03012
Author(s):  
Ilia Elmanov ◽  
Anna Elmanova ◽  
Sophia Komrakova ◽  
Alexander Golikov ◽  
Natalya Kaurova ◽  
...  

In the work the thicknesses of the e-beam resists ZEP 520A and ma-N 2400 by using non-destructive method were measured, as well as recipe for the high ratio between the Si3N4 and the resists etching rate was determined. The work has a practical application for e-beam lithography of photonic-integrated circuits and nanophotonics devices based on silicon nitride platform.


ISRN Optics ◽  
2012 ◽  
Vol 2012 ◽  
pp. 1-27 ◽  
Author(s):  
Zhou Fang ◽  
Ce Zhou Zhao

With the increasing bandwidth requirement in computing and signal processing, the inherent limitations in metallic interconnection are seriously threatening the future of traditional IC industry. Silicon photonics can provide a low-cost approach to overcome the bottleneck of the high data rate transmission by replacing the original electronic integrated circuits with photonic integrated circuits. Although the commercial promise has not been realized, this perspective gives huge impetus to the development of silicon photonics these years. This paper provides an overview of the progress and the state of the art of each component in silicon photonics, including waveguides, filters, modulators, detectors, and lasers, mainly in the last five years.


Author(s):  
Riazul Arefin ◽  
Sujit Ramachandra ◽  
Hyemin Jung ◽  
Syed M. N. Hasan ◽  
Weicheng You ◽  
...  

Author(s):  
Siva S. Yegnanarayanan ◽  
Ryan T. Maxson ◽  
Cheryl Sorace-Agaskar ◽  
Dave Kharas ◽  
Paul W. Juodawlkis

2017 ◽  
Vol 35 (4) ◽  
pp. 639-649 ◽  
Author(s):  
Abdul Rahim ◽  
Eva Ryckeboer ◽  
Ananth Z. Subramanian ◽  
Stephane Clemmen ◽  
Bart Kuyken ◽  
...  

2008 ◽  
Vol 2008 ◽  
pp. 1-7 ◽  
Author(s):  
Richard Soref

A brief overview of silicon photonics is given here in order to provide a context for invited and contributed papers in this special issue. Recent progress on silicon-based photonic components, photonic integrated circuits, and optoelectronic integrated circuits is surveyed. Present and potential applications are identified along with the scientific and engineering challenges that must be met in order to actualize applications. Some on-going government-sponsored projects in silicon optoelectronics are also described.


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