Modeling, design and analysis of the two movable plate nitride loaded MEMS variable capacitor

2004 ◽  
Author(s):  
Maher Bakri-Kassem ◽  
Raafat R. Mansour
Keyword(s):  
Movable Plate ◽  
Variable Capacitor

A Solid State Variable Capacitor With Minimum Capacitor

2017 ◽  
Vol 32 (7) ◽  
pp. 5035-5044 ◽  
Author(s):  
Runruo Chen ◽  
Yunting Liu ◽  
Fang Zheng Peng
Keyword(s):  
Solid State ◽  
Variable Capacitor ◽  
State Variable

scholarly journals Design Optimization of MEMS Based LLC Tunable Resonant Converter for Power Supplies on Chip

2013 ◽  
Vol 705 ◽  
pp. 258-263
Author(s):  
Fahimullah Khan ◽  
Yong Zhu ◽  
Jun Wei Lu ◽  
Dzung Dao
Keyword(s):  
Resonant Frequency ◽  
Resonance Frequency ◽  
Parallel Plate ◽  
Power Supplies ◽  
Resonant Converter ◽  
Load Variations ◽  
Leakage Inductance ◽  
Variable Capacitor ◽  
Numerical Software ◽  
On Chip

In this paper, a novel MEMS based LLC converter is proposed for on chip power supplies. The design is optimized based on commercially available Metal MUMPs process for fabrication. The resonant frequency is optimized at 20MHz and MEMS based variable capacitor is fabricated on the chip to tune the peak resonance frequency of circuit which varies due to the load variations. The Design is simulated in FEM based numerical software COMSOL and Intellisuite. According to analysis the magnetizing inductance of 42nH and leakage inductance of 40nH has been achieved from 16 mm2 rectangular coil transformer. The total capacitance of 1500pF has been achieved from parallel plate capacitors and variation of 3pF has been achieved from variable capacitor.

scholarly journals Principle of a variable capacitor based on Coulomb blockade of nanometric-size clusters

2004 ◽  
Vol 65 (5) ◽  
pp. 699-704 ◽  
Author(s):  
P Seneor ◽  
N Lidgi ◽  
J Carrey ◽  
H Jaffres ◽  
F. Nguyen Van Dau ◽  
...  
Keyword(s):  
Coulomb Blockade ◽  
Variable Capacitor ◽  
Nanometric Size
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