scholarly journals A new wide tunability MEMS based variable capacitor using two separate electro-static vertical comb drive actuators

2021 ◽  
Vol 34 (11) ◽  
Keyword(s):  
Comb Drive ◽  
Variable Capacitor

An Equivalent Circuit Model for Vertical Comb Drive MEMS Optical Scanner Controlled by Pulse Width Modulation

2012 ◽  
Vol 132 (1) ◽  
pp. 1-9 ◽  
Author(s):  
Satoshi Maruyama ◽  
Muneki Nakada ◽  
Makoto Mita ◽  
Takuya Takahashi ◽  
Hiroyuki Fujita ◽  
...  
Keyword(s):  
Equivalent Circuit ◽  
Pulse Width ◽  
Pulse Width Modulation ◽  
Equivalent Circuit Model ◽  
Circuit Model ◽  
Comb Drive ◽  
Optical Scanner

scholarly journals Precise phase control of resonant MOEMS mirrors by comb-drive current feedback

Mechatronics ◽  
2020 ◽  
Vol 71 ◽  
pp. 102420
Author(s):  
David Brunner ◽  
Han Woong Yoo ◽  
Georg Schitter
Keyword(s):  
Phase Control ◽  
Comb Drive ◽  
Current Feedback ◽  
Drive Current

Analysis of the “Push–pull” Capacitance Bridge Circuit for Comb-Drive Micro-electro-mechanical Oscillators

2015 ◽  
Vol 183 (3-4) ◽  
pp. 313-319 ◽  
Author(s):  
P. Zheng ◽  
W. G. Jiang ◽  
C. S. Barquist ◽  
Y. Lee ◽  
H. B. Chan
Keyword(s):  
Bridge Circuit ◽  
Comb Drive ◽  
Capacitance Bridge ◽  
Mechanical Oscillators

A Solid State Variable Capacitor With Minimum Capacitor

2017 ◽  
Vol 32 (7) ◽  
pp. 5035-5044 ◽  
Author(s):  
Runruo Chen ◽  
Yunting Liu ◽  
Fang Zheng Peng
Keyword(s):  
Solid State ◽  
Variable Capacitor ◽  
State Variable
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