Automated setup for investigation of the semiconductor structures electrophysical properties
2005 ◽
Vol 118
(1-3)
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pp. 170-174
High Temperature Material Processes An International Quarterly of High-Technology Plasma Processes
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2019 ◽
Vol 23
(3)
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pp. 283-290
Keyword(s):
2014 ◽
Vol 12
(2)
◽
pp. 191-197
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