Smooth GaN recess wet photoelectrochemical etching

2005 ◽  
Author(s):  
D. Gregusova ◽  
J. Novak ◽  
H. Hardtdegen ◽  
J. Soltys ◽  
I. Kostic ◽  
...  
Keyword(s):  
Photoelectrochemical Etching

Side-wall roughness of deep trenches in 1D and 2D periodic silicon structures fabricated by photoelectrochemical etching

2011 ◽  
Vol 8 (6) ◽  
pp. 1936-1940 ◽  
Author(s):  
E. V. Astrova ◽  
G. V. Fedulova ◽  
Yu. A. Zharova ◽  
E. V. Gushchina
Keyword(s):  
Side Wall ◽  
Wall Roughness ◽  
Photoelectrochemical Etching ◽  
Silicon Structures

Increased modulation depth of submicron gratings produced by photoelectrochemical etching of GaAs

1992 ◽  
Vol 60 (20) ◽  
pp. 2528-2530 ◽  
Author(s):  
E. J. Twyford ◽  
P. A. Kohl ◽  
N. M. Jokerst ◽  
N. F. Hartman
Keyword(s):  
Modulation Depth ◽  
Photoelectrochemical Etching ◽  
Submicron Gratings

Photoelectrochemical Etching of GaSb

1993 ◽  
Vol 140 (12) ◽  
pp. 3631-3635 ◽  
Author(s):  
Eric K. Propst ◽  
Kirkland W. Vogt ◽  
Paul A. Kohl
Keyword(s):  
Photoelectrochemical Etching
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