Non-contact multilayer thickness measurements with reflection-mode terahertz time-domain spectroscopy

Author(s):  
V.K.S. Feige ◽  
S. Nix ◽  
F. Ellrich ◽  
J. Jonuscheit ◽  
R. Beigang
2015 ◽  
Vol 8 (12) ◽  
pp. 122101 ◽  
Author(s):  
Rafael B. Jaculbia ◽  
Jefferson M. Abrenica ◽  
Elmer S. Estacio ◽  
Arnel A. Salvador ◽  
Armando S. Somintac

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