Characterization of thin polymer films with the focus on lateral stress and mechanical properties and their relevance to microelectronics

Author(s):  
Markus Woehrmann ◽  
Thorsten Fischer ◽  
Hans Walter ◽  
Michael Toepper ◽  
Klaus-Dieter Lang
2009 ◽  
Vol 517 (15) ◽  
pp. 4348-4354 ◽  
Author(s):  
Junlong Song ◽  
Jing Liang ◽  
Xiaomeng Liu ◽  
Wendy E. Krause ◽  
Juan P. Hinestroza ◽  
...  

2006 ◽  
Vol 77 (10) ◽  
pp. 104901 ◽  
Author(s):  
Hironori Tohmyoh ◽  
Takuya Imaizumi ◽  
Masumi Saka

2001 ◽  
Vol 164 (1) ◽  
pp. 159-166
Author(s):  
Gerald Steiner ◽  
Olesya Savchuk ◽  
Hella Möller ◽  
Dirk Ferse ◽  
Hans-Jürgen Adler ◽  
...  

ACS Nano ◽  
2018 ◽  
Vol 13 (1) ◽  
pp. 449-457 ◽  
Author(s):  
Kewang Nan ◽  
Heling Wang ◽  
Xin Ning ◽  
Kali A. Miller ◽  
Chen Wei ◽  
...  

Sign in / Sign up

Export Citation Format

Share Document