Three-dimensional nanostructure fabrication by focused-ion-beam chemical vapor deposition

Vapor Deposition ◽

Focused Ion Beam ◽

Ion Beam ◽

Three Dimensional ◽

Chemical Vapor ◽

Three-Dimensional Nanostructure Fabrication by Controlling Downward Growth on Focused-Ion-Beam Chemical Vapor Deposition

Japanese Journal of Applied Physics ◽

10.1143/jjap.51.065001 ◽

2012 ◽

Vol 51 ◽

pp. 065001 ◽

Cited By ~ 3

Author(s):

Dengji Guo ◽

Reo Kometani ◽

Shin'ichi Warisawa ◽

Sunao Ishihara

Keyword(s):

Vapor Deposition ◽

Focused Ion Beam ◽

Ion Beam ◽

Three Dimensional ◽

Chemical Vapor ◽

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

Three-dimensional nanostructure fabrication by focused-ion-beam chemical vapor deposition

10.1116/1.1319689 ◽

2000 ◽

Vol 18 (6) ◽

pp. 3181 ◽

Cited By ~ 330

Author(s):

Shinji Matsui ◽

Takashi Kaito ◽

Jun-ichi Fujita ◽

Masanori Komuro ◽

Kazuhiro Kanda ◽

...

Keyword(s):

Vapor Deposition ◽

Focused Ion Beam ◽

Ion Beam ◽

Three Dimensional ◽

Chemical Vapor ◽

THREE-DIMENSIONAL NANOSTRUCTURE FABRICATION BY FOCUSED-ION-BEAM CHEMICAL-VAPOR-DEPOSITION

Annual Review of Nano Research ◽

10.1142/9789814280525_0008 ◽

2009 ◽

pp. 351-383 ◽

Cited By ~ 1

Author(s):

Shinji Matsui

Keyword(s):

Vapor Deposition ◽

Focused Ion Beam ◽

Ion Beam ◽

Three Dimensional ◽

Chemical Vapor ◽

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) ◽

Three-dimensional nanostructure fabrication by focused-Ion-beam chemical vapor deposition

10.1109/sensor.2003.1215282 ◽

2004 ◽

Cited By ~ 4

Author(s):

S. Matsui

Keyword(s):

Vapor Deposition ◽

Focused Ion Beam ◽

Ion Beam ◽

Three Dimensional ◽

Chemical Vapor ◽

Three-Dimensional Nanostructure Fabrication by Focused Ion Beam Chemical Vapor Deposition

Springer Handbook of Nanotechnology ◽

10.1007/978-3-540-29857-1_6 ◽

2007 ◽

pp. 179-196 ◽

Cited By ~ 6

Author(s):

Shinji Matsui

Keyword(s):

Vapor Deposition ◽

Focused Ion Beam ◽

Ion Beam ◽

Three Dimensional ◽

Chemical Vapor ◽

Three-Dimensional Nanostructure Fabrication by Focused Ion Beam Chemical Vapor Deposition

Springer Handbook of Nanotechnology ◽

10.1007/978-3-642-02525-9_7 ◽

2010 ◽

pp. 211-229 ◽

Cited By ~ 8

Author(s):

Shinji Matsui

Keyword(s):

Vapor Deposition ◽

Focused Ion Beam ◽

Ion Beam ◽

Three Dimensional ◽

Chemical Vapor ◽

Three-Dimensional Nanostructure Fabrication by Focused-Ion-Beam Chemical Vapor Deposition and Its Applications

IEICE Transactions on Electronics ◽

10.1093/ietele/e90-c.1.25 ◽

2007 ◽

Vol E90-C (1) ◽

pp. 25-35 ◽

Cited By ~ 6

Author(s):

S. MATSUI ◽

R. KOMETANI

Keyword(s):

Vapor Deposition ◽

Focused Ion Beam ◽

Ion Beam ◽

Three Dimensional ◽

Chemical Vapor ◽

Three-Dimensional Nanostructure Fabrication by Controlling Downward Growth on Focused-Ion-Beam Chemical Vapor Deposition

Japanese Journal of Applied Physics ◽

10.7567/jjap.51.065001 ◽

2012 ◽

Vol 51 (6R) ◽

pp. 065001 ◽

Cited By ~ 3

Author(s):

Dengji Guo ◽

Reo Kometani ◽

Shin'ichi Warisawa ◽

Sunao Ishihara

Keyword(s):

Vapor Deposition ◽

Focused Ion Beam ◽

Ion Beam ◽

Three Dimensional ◽

Chemical Vapor ◽

Three-dimensional nanostructure fabrication by focused-ion-beam chemical vapor deposition

10.1117/12.690807 ◽

2006 ◽

Author(s):

Shinji Matsui

Keyword(s):

Vapor Deposition ◽

Focused Ion Beam ◽

Ion Beam ◽

Three Dimensional ◽

Chemical Vapor ◽

Three-dimensional Nanostructure Fabrication by Focused-ion-beam Chemical-vapor-deposition

Microscopy and Microanalysis ◽

10.1017/s1431927606069649 ◽

2006 ◽

Vol 12 (S02) ◽

pp. 130-131 ◽

Cited By ~ 4

Author(s):

S Matsui

Keyword(s):

Vapor Deposition ◽

Focused Ion Beam ◽

Ion Beam ◽

Three Dimensional ◽

Chemical Vapor ◽

Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2005