Three-Dimensional Nanostructure Fabrication by Controlling Downward Growth on Focused-Ion-Beam Chemical Vapor Deposition

2012 ◽  
Vol 51 ◽  
pp. 065001 ◽  
Author(s):  
Dengji Guo ◽  
Reo Kometani ◽  
Shin'ichi Warisawa ◽  
Sunao Ishihara
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Three Dimensional ◽  
Chemical Vapor ◽  
Nanostructure Fabrication

Three-dimensional nanostructure fabrication by focused-ion-beam chemical vapor deposition

2000 ◽  
Vol 18 (6) ◽  
pp. 3181 ◽  
Author(s):  
Shinji Matsui ◽  
Takashi Kaito ◽  
Jun-ichi Fujita ◽  
Masanori Komuro ◽  
Kazuhiro Kanda ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Three Dimensional ◽  
Chemical Vapor ◽  
Nanostructure Fabrication

Three-dimensional Nanostructure Fabrication by Focused-ion-beam Chemical-vapor-deposition

2006 ◽  
Vol 12 (S02) ◽  
pp. 130-131 ◽  
Author(s):  
S Matsui
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Three Dimensional ◽  
Chemical Vapor ◽  
Nanostructure Fabrication

Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2005

Sign in / Sign up

Export Citation Format

Share Document