Simulation of thermal oxidation: a three-dimensional finite element approach

Author(s):  
C. Hollauer ◽  
H. Ceric ◽  
S. Selberherr
1998 ◽  
Vol 26 (2) ◽  
pp. 115 ◽  
Author(s):  
DR Petersen ◽  
RE Link ◽  
M Patton-Mallory ◽  
FW Smith ◽  
PJ Pellicane

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