Characterization of Mems Microphone Sensitivity and Phase Distributions with Applications in Array Processing

2021 ◽  
Author(s):  
Patrick W.A. Wijnings ◽  
Sander Stuijk ◽  
Rick Scholte ◽  
Henk Corporaal
Keyword(s):  
Array Processing ◽  
Mems Microphone

scholarly journals Modeling and Characterization of a Pull-in Free MEMS Microphone

2020 ◽  
Vol 20 (12) ◽  
pp. 6314-6323 ◽  
Author(s):  
Mehmet Ozdogan ◽  
Shahrzad Towfighian ◽  
Ronald N. Miles
Keyword(s):  
Mems Microphone

scholarly journals Design and Characterization of a Micro-Fabricated Graphene-Based MEMS Microphone

2019 ◽  
Vol 19 (17) ◽  
pp. 7234-7242 ◽  
Author(s):  
Graham S. Wood ◽  
Alberto Torin ◽  
Asaad K. Al-mashaal ◽  
Leslie S. Smith ◽  
Enrico Mastropaolo ◽  
...  
Keyword(s):  
Mems Microphone

Noise Modeling and Characterization of Piezoresistive Transducers

2006 ◽  
Author(s):  
Toshikazu Nishida ◽  
Robert Dieme ◽  
Mark Sheplak ◽  
Gijs Bosman
Keyword(s):  
Dynamic Range ◽  
Measurement Techniques ◽  
Low Frequency ◽  
Noise Model ◽  
Noise Modeling ◽  
Mems Microphone ◽  
Output Noise ◽  
Noise Measurements ◽  
Transducer Output

This paper presents detailed results on noise modeling and experimental characterization applicable to piezoresistive MEMS transducers using a piezoresistive MEMS microphone as an example. To accurately model the lower limit of the dynamic range of piezoresistive MEMS transducers, a detailed noise equivalent circuit, piezoresistor noise model, and experimental noise measurements are needed. From the sensitivity and the total root-mean-square output noise, the minimum detectable signal (MDS) may be computed. Key experimental results include comparison of the DC bridge and AC bridge noise measurement techniques and use of the AC measurement technique when the piezoresistive transducer output noise is less than the low frequency DC setup noise.

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