Design and modeling of RF MEMS metal contact switch for wireless applications

2016 ◽  
Author(s):  
R. Raman ◽  
T. Shanmuganantham
Keyword(s):  
Rf Mems ◽  
Metal Contact ◽  
Wireless Applications ◽  
Contact Switch

scholarly journals Cantilever Beam Metal-Contact MEMS Switch

2013 ◽  
Vol 2013 ◽  
pp. 1-4 ◽  
Author(s):  
Adel Saad Emhemmed ◽  
Abdulmagid A. Aburwein
Keyword(s):  
Cantilever Beam ◽  
Rf Mems ◽  
Spring Constant ◽  
Metal Contact ◽  
Rf Mems Switch ◽  
Microelectromechanical System ◽  
Mems Switch ◽  
Integrated Method ◽  
Beam Geometry ◽  
Contact Switch

We present a new design of a miniature RF microelectromechanical system (MEMS) metal-contact switch and investigate various aspects associated with lowering the pull-down voltage and overcoming the stiction problem. Lowering the pull-down voltage in this design is based on reducing the spring constant by changing the cantilever beam geometry of the RF MEMS switch, and the stiction problem is overcome by a simple integrated method using two tiny posts located on the substrate at the free end of the cantilever beam.

RF MEMS phase shifters for wireless applications

2013 ◽  
pp. 136-175 ◽  
Author(s):  
V. Puyal ◽  
Cea Leti ◽  
Laas Cnrs ◽  
D. Titz
Keyword(s):  
Rf Mems ◽  
Phase Shifters ◽  
Wireless Applications
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