Test structures for the characterisation of MEMS and CMOS integration technology

Author(s):  
H. Lin ◽  
A.J. Walton ◽  
C.C. Dunarc ◽  
J.T.M. Stevenson ◽  
A.M. Gundlach ◽  
...  
1999 ◽  
Author(s):  
Peter Buneman ◽  
S. Davidson ◽  
V. Tannen

2014 ◽  
Vol 61 ◽  
pp. 365-368 ◽  
Author(s):  
Chunfeng Song ◽  
Yasuki Kansha ◽  
Masanori Ishizuka ◽  
Qian Fu ◽  
Atsushi Tsutsumi

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