2006 IEEE International Conference on Microelectronic Test Structures
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MEMS test structure for measuring thermal conductivity of thin films

2006 ◽  
Author(s):  
L. La Spina ◽  
N. Nenadovic ◽  
A.W. van Herwaarden ◽  
H. Schellevis ◽  
W.H.A. Wien ◽  
...  
Keyword(s):  
Thin Films ◽  
Thermal Conductivity ◽  
Test Structure ◽  
Conductivity Of Thin Films

Test structures for the characterisation of MEMS and CMOS integration technology

2006 ◽  
Author(s):  
H. Lin ◽  
A.J. Walton ◽  
C.C. Dunarc ◽  
J.T.M. Stevenson ◽  
A.M. Gundlach ◽  
...  
Keyword(s):  
Integration Technology
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