Analysis of Local and Nonlocal Electron Kinetics Through Energy Relaxation Process in a Capacitive RF Plasma
Keyword(s):
1997 ◽
Vol 204
(1)
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pp. 423-426
Keyword(s):
2016 ◽
Vol 18
(4)
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pp. 3244-3249
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Keyword(s):
1975 ◽
Vol 38
(5)
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pp. 1394-1399
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Keyword(s):
1990 ◽
Vol 10
(3)
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pp. 419-442
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