199-MHz Polysilicon Micromechanical Disk Array-Composite Oscillator

Author(s):  
Qianyi Xie ◽  
Sherwin Afshar ◽  
Alper Ozgurluk ◽  
Clark T.-C. Nguyen
Keyword(s):  
Author(s):  
Jehan-François Pâris ◽  
Thomas Schwarz ◽  
Ahmed Amer ◽  
Darrell D.E. Long
Keyword(s):  

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