19th IEEE International Conference on Micro Electro Mechanical Systems
Latest Publications

TOTAL DOCUMENTS

240

(FIVE YEARS 0)

H-INDEX

14

(FIVE YEARS 0)

Published By IEEE

0780394755

Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Piezoelectric Actuator Integrated Cantilever with Tunable Spring Constant For Atom Probe

19th IEEE International Conference on Micro Electro Mechanical Systems ◽

10.1109/memsys.2006.1627915 ◽

2006 ◽

Author(s):

Y. Kawai ◽

T. Ono ◽

E. Meyers ◽

C. Gerber ◽

M. Esashi

Keyword(s):

Piezoelectric Actuator ◽

Spring Constant

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A 32*32 Parylene-Pyrolyzed Carbon Bolometer Imager

19th IEEE International Conference on Micro Electro Mechanical Systems ◽

10.1109/memsys.2006.1627747 ◽

2006 ◽

Author(s):

M. Liger ◽

Yu-Chong Tai

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Nanotechnology: An Overview and Integration with MEMS

19th IEEE International Conference on Micro Electro Mechanical Systems ◽

10.1109/memsys.2006.1627721 ◽

2006 ◽

Author(s):

M. Meyyappan ◽

Jing Li ◽

Jun Li ◽

A. Cassell

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Disk-Array Design for Suppression of Unwanted Modes in Micromechanical Composite-Array Filters

19th IEEE International Conference on Micro Electro Mechanical Systems ◽

10.1109/memsys.2006.1627937 ◽

2006 ◽

Author(s):

Sheng-Shian Li ◽

Yu-Wei Lin ◽

Zeying Ren ◽

C.T.-C. Nguyen

Keyword(s):

Array Design ◽

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Infrared Light Induced Patterning of Proteins on ppNIPAM Thermoresponsive Thin Films: A “Protein Laser Printer”

19th IEEE International Conference on Micro Electro Mechanical Systems ◽

10.1109/memsys.2006.1627853 ◽

2006 ◽

Author(s):

K.F. Bohringer ◽

H. Bilge ◽

Xuanhong Cheng ◽

B. Ratner ◽

S. Takeuchi ◽

...

Keyword(s):

Laser Printer ◽

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Micromachined SU-8 Probe Integrated with Film-bulk-acoustic Resonant Mass Sensor

19th IEEE International Conference on Micro Electro Mechanical Systems ◽

10.1109/memsys.2006.1627741 ◽

2006 ◽

Author(s):

Hao Zhang ◽

Wei Pang ◽

Eun Sok Kim

Keyword(s):

Mass Sensor ◽

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DNA Self-Focusing Chips Using Nonuniformly Distributed Asymmetric Electric Fields

19th IEEE International Conference on Micro Electro Mechanical Systems ◽

10.1109/memsys.2006.1627831 ◽

2006 ◽

Author(s):

Soyeon Yi ◽

Young-Ho Cho

Keyword(s):

Electric Fields ◽

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Flexible Skin with Two-Axis Bending Capability Made Using Weaving-By-Lithography Fabrication Method

19th IEEE International Conference on Micro Electro Mechanical Systems ◽

10.1109/memsys.2006.1627803 ◽

2006 ◽

Author(s):

N. Chen ◽

J. Engel ◽

S. Pandya ◽

C. Liu

Keyword(s):

Fabrication Method ◽

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Fabrication of the Flexible Sensor Using SOI Wafer by Removing the Thick Silicon Layer

19th IEEE International Conference on Micro Electro Mechanical Systems ◽

10.1109/memsys.2006.1627751 ◽

2006 ◽

Author(s):

K. Noda ◽

K. Hoshino ◽

K. Matsumoto ◽

I. Shimoyama

Keyword(s):

Silicon Layer ◽

Flexible Sensor

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Brilliant Dust: Nanoparticle Doped On-Chip Microplasmas for Fluorescent Detection of Biomolecules

19th IEEE International Conference on Micro Electro Mechanical Systems ◽

10.1109/memsys.2006.1627809 ◽

2006 ◽

Author(s):

K. Peri ◽

M. McShane ◽

C.G. Wilson

Keyword(s):

Fluorescent Detection ◽

Detection Of Biomolecules ◽

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