Enhanced low energy drift-mode beam currents in a high current ion implanter

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E. Bell ◽  
D. Brown ◽  
J. Buff ◽  
M. Collins ◽  
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1999 ◽  
Vol 70 (10) ◽  
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pp. 1804-1809
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E. V. Yakovlev ◽  
A. B. Markov ◽  
D. A. Shepel ◽  
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Vol 83 (2) ◽  
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Vol 81 (2) ◽  
pp. 02B307 ◽  
Author(s):  
A. V. Vizir ◽  
M. V. Shandrikov ◽  
G. Yu. Yushkov ◽  
E. M. Oks
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