Creation of individual holes in SiO/sub 2/ on Si by swift heavy ion bombardment followed by wet and dry etching
2000 ◽
Vol 39
(Part 1, No. 12B)
◽
pp. 7058-7059
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2006 ◽
Vol 245
(1)
◽
pp. 145-149
◽
2003 ◽
Vol 28
(2)
◽
pp. 71-78
Keyword(s):
1996 ◽
Vol 115
(1-4)
◽
pp. 594-597
◽
2018 ◽
Vol 435
◽
pp. 101-110
◽
1996 ◽
Vol 107
(1-4)
◽
pp. 155-159
◽
Keyword(s):