Formation of Individual Holes in Amorphous SiO2by Swift Heavy-Ion Bombardment Followed by Wet and Dry Etching

Koichi Awazu; Satoshi Ishii; Kunihiro Shima

doi:10.1143/jjap.39.7058

Formation of Individual Holes in Amorphous SiO2by Swift Heavy-Ion Bombardment Followed by Wet and Dry Etching

Japanese Journal of Applied Physics ◽

10.1143/jjap.39.7058 ◽

2000 ◽

Vol 39 (Part 1, No. 12B) ◽

pp. 7058-7059 ◽

Cited By ~ 5

Author(s):

Koichi Awazu ◽

Satoshi Ishii ◽

Kunihiro Shima

Keyword(s):

Ion Bombardment ◽

Dry Etching ◽

Heavy Ion ◽

Swift Heavy Ion

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Creation of individual holes in SiO/sub 2/ on Si by swift heavy ion bombardment followed by wet and dry etching

Digest of Papers Microprocesses and Nanotechnology 2000. 2000 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.00EX387) ◽

10.1109/imnc.2000.872629 ◽

2002 ◽

Author(s):

K. Awazu ◽

S. Ishii ◽

K. Shima

Keyword(s):

Ion Bombardment ◽

Dry Etching ◽

Heavy Ion ◽

Swift Heavy Ion

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Smoothing of Fe/Au and Fe/Ag multilayers by swift heavy ion bombardment

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/j.nimb.2005.11.163 ◽

2006 ◽

Vol 245 (1) ◽

pp. 145-149 ◽

Cited By ~ 7

Author(s):

C. Rumbolz ◽

W. Bolse ◽

S. Kumar ◽

R.S. Chauhan ◽

D. Kabiraj ◽

...

Keyword(s):

Ion Bombardment ◽

Heavy Ion ◽

Swift Heavy Ion

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Mechanical properties of Sialon glass after swift heavy-ion bombardment

Annales de Chimie Science des Matériaux ◽

10.1016/s0151-9107(03)00034-5 ◽

2003 ◽

Vol 28 (2) ◽

pp. 71-78

Author(s):

R DAUCE

Keyword(s):

Mechanical Properties ◽

Ion Bombardment ◽

Heavy Ion ◽

Swift Heavy Ion

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Effects of swift heavy ion bombardment on magnetic tunnel junction functional properties

Journal of Applied Physics ◽

10.1063/1.1558659 ◽

2003 ◽

Vol 93 (10) ◽

pp. 7301-7303 ◽

Cited By ~ 21

Author(s):

Y. Conraux ◽

J. P. Nozières ◽

V. Da Costa ◽

M. Toulemonde ◽

K. Ounadjela

Keyword(s):

Functional Properties ◽

Tunnel Junction ◽

Magnetic Tunnel Junction ◽

Ion Bombardment ◽

Heavy Ion ◽

Swift Heavy Ion

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Elastic energy loss and defect dynamics under swift heavy ion bombardment

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/0168-583x(95)01551-5 ◽

1996 ◽

Vol 115 (1-4) ◽

pp. 594-597 ◽

Cited By ~ 2

Author(s):

Yu.N. Yavlinskii

Keyword(s):

Energy Loss ◽

Elastic Energy ◽

Ion Bombardment ◽

Heavy Ion ◽

Swift Heavy Ion

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Structure of latent tracks created by swift heavy-ion bombardment of amorphousSiO2

Physical Review B ◽

10.1103/physrevb.62.3689 ◽

2000 ◽

Vol 62 (6) ◽

pp. 3689-3698 ◽

Cited By ~ 73

Author(s):

K. Awazu ◽

S. Ishii ◽

K. Shima ◽

S. Roorda ◽

J. L. Brebner

Keyword(s):

Ion Bombardment ◽

Heavy Ion ◽

Swift Heavy Ion

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Desorption of nitrogen from amorphous carbon under electron and swift heavy ion bombardment

Surface Science ◽

10.1016/s0039-6028(02)02617-1 ◽

2003 ◽

Vol 528 (1-3) ◽

pp. 103-109 ◽

Cited By ~ 3

Author(s):

M. Caron ◽

H. Rothard ◽

A. Clouvas

Keyword(s):

Amorphous Carbon ◽

Ion Bombardment ◽

Heavy Ion ◽

Swift Heavy Ion

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Mass spectrometric investigation of material sputtered under swift heavy ion bombardment

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/j.nimb.2017.10.019 ◽

2018 ◽

Vol 435 ◽

pp. 101-110 ◽

Cited By ~ 6

Author(s):

L. Breuer ◽

P. Ernst ◽

M. Herder ◽

F. Meinerzhagen ◽

M. Bender ◽

...

Keyword(s):

Ion Bombardment ◽

Heavy Ion ◽

Mass Spectrometric ◽

Spectrometric Investigation ◽

Mass Spectrometric Investigation ◽

Swift Heavy Ion

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Biomolecular Emission by Swift Heavy Ion Bombardment

10.1063/1.3548357 ◽

2011 ◽

Cited By ~ 1

Author(s):

Yoshinobu Wakamatsu ◽

Hideaki Yamada ◽

Satoshi Ninomiya ◽

Brian N. Jones ◽

Toshio Seki ◽

...

Keyword(s):

Ion Bombardment ◽

Heavy Ion ◽

Swift Heavy Ion

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Anisotropic creep and growth of amorphous solids under swift heavy ion bombardment: An asymptotic thermal spike approach

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/0168-583x(95)00803-9 ◽

1996 ◽

Vol 107 (1-4) ◽

pp. 155-159 ◽

Cited By ~ 38

Author(s):

H. Trinkaus

Keyword(s):

Ion Bombardment ◽

Amorphous Solids ◽

Heavy Ion ◽

Thermal Spike ◽

Swift Heavy Ion ◽

Anisotropic Creep

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