Molecular engineering for future device structures: self-assembled monolayers as diffusion barriers for Cu metallization

2007 ◽  
Author(s):  
C.M. Whelan ◽  
A. Maestre Caro ◽  
F. Clemente ◽  
G. Beyer ◽  
Z. Tokei ◽  
...  
Keyword(s):  
Diffusion Barriers ◽  
Molecular Engineering ◽  
Self Assembled Monolayers ◽  
Cu Metallization ◽  
Device Structures ◽  
Assembled Monolayers ◽  
Self Assembled

Screening self-assembled monolayers as Cu diffusion barriers

2008 ◽  
Vol 85 (10) ◽  
pp. 2047-2050 ◽  
Author(s):  
A. Maestre Caro ◽  
G. Maes ◽  
G. Borghs ◽  
C.M. Whelan
Keyword(s):  
Diffusion Barriers ◽  
Self Assembled Monolayers ◽  
Assembled Monolayers ◽  
Self Assembled

Self-Assembled Monolayers as Cu Diffusion Barriers for Ultralow-k Dielectrics

2006 ◽  
Vol 9 (7) ◽  
pp. F61 ◽  
Author(s):  
B. Ramana Murthy ◽  
Wan Mun Yee ◽  
Ahila Krishnamoorthy ◽  
R. Kumar ◽  
D. C. Frye
Keyword(s):  
Diffusion Barriers ◽  
Self Assembled Monolayers ◽  
Assembled Monolayers ◽  
Self Assembled

Bottom-Up Engineering of Subnanometer Copper Diffusion Barriers Using NH2-Derived Self-Assembled Monolayers

2010 ◽  
Vol 20 (7) ◽  
pp. 1125-1131 ◽  
Author(s):  
Arantxa Maestre Caro ◽  
Silvia Armini ◽  
Olivier Richard ◽  
Guido Maes ◽  
Gustaaf Borghs ◽  
...  
Keyword(s):  
Diffusion Barriers ◽  
Self Assembled Monolayers ◽  
Bottom Up ◽  
Copper Diffusion ◽  
Assembled Monolayers ◽  
Self Assembled

Electrochemical behavior of self-assembled monolayers based on functionalized oligothiophenes

1998 ◽  
Vol 95 (6) ◽  
pp. 1339-1342 ◽  
Author(s):  
R. Michalitsch ◽  
A. El Kassmi ◽  
P. Lang ◽  
A. Yassar ◽  
F. Garnier
Keyword(s):  
Electrochemical Behavior ◽  
Self Assembled Monolayers ◽  
Assembled Monolayers ◽  
Self Assembled

Imaging of patterned self-assembled monolayers by scanning photoelectron microscopy

2003 ◽  
Vol 104 ◽  
pp. 459-462 ◽  
Author(s):  
R. Klauser ◽  
M. Zharnikov ◽  
I.-H. Hong ◽  
S.-C. Wang ◽  
A. Gölzhäuser ◽  
...  
Keyword(s):  
Self Assembled Monolayers ◽  
Assembled Monolayers ◽  
Scanning Photoelectron Microscopy ◽  
Self Assembled
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