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A new mechanism of leakage current in ultra-shallow junctions with TiSi/sub 2/ contacts
Proceedings of the 1997 6th International Symposium on the Physical and Failure Analysis of Integrated Circuits
◽
10.1109/ipfa.1997.638206
◽
2002
◽
Author(s):
Wai Shing Lau
◽
Peng Wei Qian
◽
Rong Zhao
Keyword(s):
Leakage Current
◽
Shallow Junctions
◽
Ultra Shallow Junctions
Download Full-text
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Non-contact sheet resistance and leakage current monitoring of multi-implant, ultra-shallow junctions: Doping and damage effects for ms-anneals
10.1063/1.2401585
◽
2006
◽
Author(s):
M. I. Current
◽
V. N. Faifer
◽
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◽
T. Nguyen
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Sheet Resistance
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Leakage Current
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Shallow Junctions
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Ultra Shallow Junctions
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Noncontact sheet resistance and leakage current mapping for ultra-shallow junctions
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◽
10.1116/1.2137334
◽
2006
◽
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Sheet Resistance
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Leakage Current
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Shallow Junctions
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Ultra Shallow Junctions
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Leakage Current Characteristics of Ultra-Shallow Junctions formed by B2H6 Plasma Doping
ECS Meeting Abstracts
◽
10.1149/ma2006-02/20/1002
◽
2006
◽
Keyword(s):
Leakage Current
◽
Plasma Doping
◽
Shallow Junctions
◽
Ultra Shallow Junctions
◽
Current Characteristics
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Leakage Current Characteristics of Ultra-Shallow Junctions Formed by B2H6 Plasma Doping
ECS Transactions
◽
10.1149/1.2356264
◽
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Author(s):
Hendriansyah Sauddin
◽
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...
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Leakage Current
◽
Plasma Doping
◽
Shallow Junctions
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Ultra Shallow Junctions
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Current Characteristics
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Vacancy-type defects in ultra-shallow junctions fabricated using plasma doping studied by positron annihilation
2010 International Workshop on Junction Technology Extended Abstracts
◽
10.1109/iwjt.2010.5474912
◽
2010
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Author(s):
Akira Uedono
◽
Kazuo Tsutsui
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◽
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◽
...
Keyword(s):
Positron Annihilation
◽
Plasma Doping
◽
Shallow Junctions
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Ultra Shallow Junctions
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Formation of Ultra-Shallow Junctions by Advanced Plasma Doping Techniques
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◽
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◽
...
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Plasma Doping
◽
Shallow Junctions
◽
Ultra Shallow Junctions
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Engineering ultra-shallow junctions using fRTP/sup TM/
10th IEEE International Conference of Advanced Thermal Processing of Semiconductors
◽
10.1109/rtp.2002.1184454
◽
2003
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◽
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◽
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◽
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Shallow Junctions
◽
Ultra Shallow Junctions
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Leakage optimization of ultra-shallow junctions formed by solid phase epitaxial regrowth
Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena
◽
10.1116/1.1638774
◽
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◽
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◽
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◽
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◽
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◽
...
Keyword(s):
Solid Phase
◽
Epitaxial Regrowth
◽
Shallow Junctions
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Ultra Shallow Junctions
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Photoluminescence Characterization of Defects in Rapidly Annealed Ultra Shallow Junctions
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◽
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Shallow Junctions
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Defects in Ultra-Shallow Junctions
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◽
10.1201/9781420043778.ch1
◽
2008
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Author(s):
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◽
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◽
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◽
Kevin Jones
Keyword(s):
Shallow Junctions
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Ultra Shallow Junctions
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