Leakage Current Characteristics of Ultra-Shallow Junctions formed by B2H6
Plasma Doping
Keyword(s):
Keyword(s):
1997 ◽
Vol 121
(1-4)
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pp. 216-220
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2004 ◽
Vol 114-115
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pp. 358-361
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1998 ◽
Vol 38
(9)
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pp. 1485-1488
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2004 ◽
Vol 186
(1-2)
◽
pp. 17-20
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