A Miniaturized PM2.5 Sensor Module Based on a Thin-Film Piezoelectric-on-Silicon MEMS Oscillator

Author(s):  
Chien-Hao Weng ◽  
Cheng-Yen Wu ◽  
Gayathri Pillai ◽  
Sheng-Hsian Tseng ◽  
Chih-Yuan Yeh ◽  
...  
1989 ◽  
Vol 25 (5) ◽  
pp. 3821-3823
Author(s):  
H. Yoda ◽  
S. Kurashima ◽  
M. Endoh ◽  
N. Wakatsuki

Author(s):  
Lei Ma ◽  
Shreyes N. Melkote ◽  
John B. Morehouse ◽  
James B. Castle ◽  
James W. Fonda ◽  
...  

A sensor module that integrates a thin film Polyvinylidene Fluoride (PVDF) piezoelectric strain sensor and an in situ data logging platform has been designed and implemented for monitoring of feed and transverse forces in the peripheral end milling process. The module, which is mounted on the tool shank, measures the dynamic strain(s) produced in the tool and logs the data into an on-board card for later retrieval. The close proximity between the signal source and the PVDF sensor(s) minimizes the attenuation and distortion of the signal along the transmitting path and provides high-fidelity signals. It also facilitates the employment of a first principles model based on Euler-Bernoulli beam theory and the constitutive equations of the piezoelectric sensor material to relate the in situ measured PVDF sensor signals to the feed and transverse forces acting on the tool. The PVDF sensor signals are found to compare well with the force signals measured by a platform type piezoelectric force dynamometer in peripheral end milling experiments.


Author(s):  
H. Yoda ◽  
S. Kurashima ◽  
M. Endoh ◽  
N. Wakatsuki

2020 ◽  
Vol 20 (24) ◽  
pp. 14722-14731
Author(s):  
Chien-Hao Weng ◽  
Gayathri Pillai ◽  
Sheng-Shian Li

Author(s):  
Lei Ma ◽  
Shreyes N. Melkote ◽  
John B. Morehouse ◽  
James B. Castle ◽  
James W. Fonda

A sensor module that integrates a thin film PVDF piezoelectric strain sensor and a wireless data processing/transmitting platform has been designed and implemented for wireless monitoring of the feed force in the slot end milling process. The module, which is mounted on the tool shank, measures the dynamic strain produced in the tool and transmits data wirelessly to the receiver connected to a data acquisition computer. A first principles model based on the Euler-Bernoulli beam theory and constitutive equations of the piezoelectric sensor material is used to transform the wirelessly obtained data into the feed force acting on the tool in a slot milling operation. The wireless PVDF sensor signal is found to compare well with the expected (or theoretical) sensor signal computed from the measured feed force in slot milling experiments.


2020 ◽  
Vol 20 (13) ◽  
pp. 7001-7009 ◽  
Author(s):  
Chien-Hao Weng ◽  
Gayathri Pillai ◽  
Sheng-Shian Li

Author(s):  
Lei Ma ◽  
Shreyes N. Melkote ◽  
John B. Morehouse ◽  
James B. Castle ◽  
James W. Fonda ◽  
...  

A sensor module that integrates a thin film polyvinylidene fluoride (PVDF) piezoelectric strain sensor and an in situ data logging platform has been designed and implemented for monitoring of the feed and transverse forces in the peripheral end milling process. The module, which is mounted on the tool shank, measures the dynamic strain(s) produced in the tool and logs the data into an on-board card for later retrieval. The close proximity between the signal source and the PVDF sensor(s) minimizes the attenuation and distortion of the signal along the transmission path and provides high-fidelity signals. It also facilitates the employment of a first principles model based on the Euler–Bernoulli beam theory and constitutive equations of the piezoelectric sensor material to relate the in situ measured PVDF sensor signals to the feed and transverse forces acting on the tool. The PVDF sensor signals are found to compare well with the force signals measured by a platform-type piezoelectric force dynamometer in peripheral end milling experiments.


Author(s):  
D. M. Davies ◽  
R. Kemner ◽  
E. F. Fullam

All serious electron microscopists at one time or another have been concerned with the cleanliness and freedom from artifacts of thin film specimen support substrates. This is particularly important where there are relatively few particles of a sample to be found for study, as in the case of micrometeorite collections. For the deposition of such celestial garbage through the use of balloons, rockets, and aircraft, the thin film substrates must have not only all the attributes necessary for use in the electron microscope, but also be able to withstand rather wide temperature variations at high altitude, vibration and shock inherent in the collection vehicle's operation and occasionally an unscheduled violent landing.Nitrocellulose has been selected as a film forming material that meets these requirements yet lends itself to a relatively simple clean-up procedure to remove particulate contaminants. A 1% nitrocellulose solution is prepared by dissolving “Parlodion” in redistilled amyl acetate from which all moisture has been removed.


Author(s):  
E.J. Jenkins ◽  
D.S. Tucker ◽  
J.J. Hren

The size range of mineral and ceramic particles of one to a few microns is awkward to prepare for examination by TEM. Electrons can be transmitted through smaller particles directly and larger particles can be thinned by crushing and dispersion onto a substrate or by embedding in a film followed by ion milling. Attempts at dispersion onto a thin film substrate often result in particle aggregation by van der Waals attraction. In the present work we studied 1-10 μm diameter Al2O3 spheres which were transformed from the amprphous state to the stable α phase.After the appropriate heat treatment, the spherical powders were embedded in as high a density as practicable in a hard EPON, and then microtomed into thin sections. There are several advantages to this method. Obviously, this is a rapid and convenient means to study the microstructure of serial slices. EDS, ELS, and diffraction studies are also considerably more informative. Furthermore, confidence in sampling reliability is considerably enhanced. The major negative feature is some distortion of the microstructure inherent to the microtoming operation; however, this appears to have been surprisingly small. The details of the method and some typical results follow.


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