Finite Element Modeling of Pad Deformation due to Diamond Disc Conditioning in Chemical Mechanical Polishing (CMP)

Chemical mechanical planarization (CMP) is widely used to planarize and smooth the surface of semiconductor wafers. In CMP, diamond disc conditioning is traditionally employed to restore pad planarity and surface asperity. Pad deformation which occurs during conditioning affects the material removal mechanism of CMP since pad shape, stress and strain are related to cut rate during conditioning, pad wear rate and wafer material removal rate (MRR) during polishing. Available reports concerning the effect of diamond disc conditioning on pad deformation are based on simplified models of the pad and do not consider its microstructure. In this study, a two-dimensional (2-D) finite element analysis (FEA) model is proposed to analyze the interaction between the diamond disc conditioner and the polishing pad. To enhance modeling fidelity, image processing is utilized to characterize the morphological and mechanical properties of the pad. An FEA model of the characterized pad is developed and utilized to study the effects of process parameters (conditioning pressure and pad stiffness) on pad deformation. The study reveals that understanding the morphological and mechanical properties of CMP pads is important to the design of high performance pads.

Studying the Temperature Effect During the High-Pressure Phase Transformation of Silicon via Indentations

Micro-laser assisted machining (μ-LAM) is a novel micro/nano machining technique developed for ductile mode machining of ceramics and semiconductors. Ductile mode material removal is possible in a nominally brittle material due to the high-pressure phase transformation (HPPT) phenomenon during the machining process. This study isolates the pressure and temperature effect in the μ-LAM process. The μ-LAM process is unique whereby the pressure and temperature effect occur concurrently leading to the material removal process. The effect of temperature and thermal softening is studied via indentation tests using a cutting tool. In the precisely controlled indentation tests, laser heating is applied at various stages to determine the phase (i.e. atmospheric Si-I phase or high pressure phases that benefits most from the thermal softening effect. The indentation depths are measured and compared for each condition to identify the enhanced ductility of the nominally brittle material caused by the laser irradiation.

Deposition of Al-Doped Zinc Oxide by Direct Pulsed Laser Recrystallization at Room Temperature on Various Substrates for Solar Cell Applications

In this study, a method combining room temperature pulsed laser deposition (PLD) and direct pulsed laser recrystallization (DPLR) are introduced to deposit superior transparent conductive oxide (TCO) layer on low melting point flexible substrates. As an indispensable component of thin film solar cell, TCO layer with a higher quality will improve the overall performance of solar cells. Alumina-doped zinc oxide (AZO), as one of the most promising TCO candidates, has now been widely used in solar cells. However, to achieve optimal electrical and optical properties of AZO on low melting point flexible substrate is challenging. Recently developed direct pulsed laser recrystallization (DPLR) technique is a scalable, economic and fast process for point defects elimination and recrystallization at room temperature. It features selective processing by only heating up the TCO thin film and preserve the underlying substrate at low temperature. In this study, 250 nm AZO thin film is pre-deposited by pulsed laser deposition (PLD) on flexible and rigid substrates. Then DPLR is introduced to achieve a uniform TCO layer on low melting point flexible substrates, i.e. commercialized Kapton polyimide film and micron-thick Al-foil. Both finite element analysis (FEA) simulation and designed experiments are carried out to demonstrate that DPLR is promising in manufacturing high quality AZO layers without any damage to the underlying flexible substrates. Under appropriate experiment conditions, such as 248 nm in laser wavelength, 25 ns in laser pulse duration, 15 laser pulses at laser fluence of 25 mJ/cm2, desired temperature would result in the AZO thin film and activate the grain growth and recrystallization. Besides laser conditions, the thermal conductivity and crystallinity of the substrate serve as additional factors in the DPLR process. It is found that the substrate’s thermal conductivity correlates positively with the AZO crystal size; the substrate’s crystallinity correlates positively with the AZO film’s crystallinity. The thermal expansion of substrate would also contribute to the film tensile stress after processed by DPLR technique. The overall results indicate that DPLR technique is useful and scalable for flexible solar cell manufacturing.

Formation Condition of Scale Layer on Work Roll in Hot Steel Rolling

It is well known that scale layer on work roll forms in hot sheet rolling of steel and scale layer on work roll plays an important role for hot rolling process. The formation conditions of scale layer on work roll are slightly known qualitatively and are hardly understood quantitatively. In order to investigate quantitatively the conditions of scale formation, three steels with different Si content are used and the slip rolling is carried out at a constant roll speed changing the scale thickness of steel workpiece and the reduction. The formation conditions of scale layer on work roll are examined quantitatively by observation of work roll surface after slip rolling. The experiments are carried out at constant rolling conditions of a velocity ratio of 20, a rolling speed of 50 m/min and a furnace temperature of 800 °C, changing the rolling reductions of 0.3, 0.5 and 1.0 mm and scale thickness of workpiece. The colza oil is used as base oil. The emulsion concentration is 3.0%. The emulsion temperature is controlled at 40 °C. Scale layer on work roll forms easily with increasing rolling reduction and decreasing scale thickness of workpiece for three steels A, B and C. In order to estimate quantitatively the formation condition of scale layer on work roll, parameter α which is given by a ratio of the rolling reduction to scale thickness of workpiece is proposed. Scale layer on work roll forms when values of parameter α become same for each steels. Values of parameter α become larger in order of steels A, B and C and it can be understood that scale layer on work roll forms easily in order of steels A, B and C. When FeO layer in scale of the steel surface adheres on work roll surface, it is expected that scale layer on work roll forms easily and strongly by transformation from FeO to Fe3O4, considering that the chemical composition of scale layer on work roll is Fe3O4.

Intelligent Modeling and Optimization of Material Removal Rate in Electric Discharge Diamond Grinding

Metal matrix composites (MMCs) have wide applications in modern manufacturing industries due to their specific and improved technological characteristics such as high strength to weight ratio, high hardness, high thermal, corrosion and wear resistances. Such characteristics are highly demanded in automobile, aircraft and space research organizations. Shaping of MMCs has been a big challenge for manufacturing industries due to their superior mechanical properties and the peculiar microstructure composed of different phases in MMCs poses machining challenges. Unconventional machining methods have become an alternative to give desired shapes with intricate profiles and stringent design requirements. The aim of present research is to investigate the machining performance of copper-iron-carbide MMC using hybrid machining process, electric discharge diamond grinding (EDDG). A hybrid approach of neural network and genetic algorithm has been used to develop the intelligent model for material removal rate (MRR) and subsequent optimization with the experimental data obtained by scientifically designed experimentation.

Thin-Film PVDF Sensor Based Monitoring of Cutting Forces in Peripheral End Milling

A sensor module that integrates a thin film Polyvinylidene Fluoride (PVDF) piezoelectric strain sensor and an in situ data logging platform has been designed and implemented for monitoring of feed and transverse forces in the peripheral end milling process. The module, which is mounted on the tool shank, measures the dynamic strain(s) produced in the tool and logs the data into an on-board card for later retrieval. The close proximity between the signal source and the PVDF sensor(s) minimizes the attenuation and distortion of the signal along the transmitting path and provides high-fidelity signals. It also facilitates the employment of a first principles model based on Euler-Bernoulli beam theory and the constitutive equations of the piezoelectric sensor material to relate the in situ measured PVDF sensor signals to the feed and transverse forces acting on the tool. The PVDF sensor signals are found to compare well with the force signals measured by a platform type piezoelectric force dynamometer in peripheral end milling experiments.

Initial Investigation Into Helical Milling of Laminated Stacks of Electrical Steel

This paper serves to report the findings of an initial study on the holing of laminated stacks of electrical steels. Three different holing methods were considered: plunge milling, helical milling (orbit milling), and drilling. Stack delamination, axial thrust force, and burr formation were measured at various feed rates for each process and utilized as comparison metrics. Results from the initial experimental investigation indicate that drilling produces significant burr and plunge milling, whilst reducing burr formation compared to drilling, led to delamination of the stack. Helical milling minimized thrust forces, avoided delamination and minimized burr formation. An interesting spring back effect was also observed during the cutting of the laminated stacks. It is concluded that helical milling is a viable and effective processing method for making holes in laminated stack of hard electrical steels.

An Analysis of Polishing Forces in Magnetic Field Assisted Finishing

Magnetic field assisted finishing (MAF) is used to polish free-form surfaces. The material removal mechanism can be described as a flexible “magnetic brush” that consists of ferromagnetic particles and abrasives that arrange themselves in the working gap between the magnet and the work piece. Relative motion between the brush and the work piece causes micro-cutting and improves surface finish. In this study, the contributions of the magnetic and polishing force components to the total force were evaluated. The effect of varying the polishing conditions, such as the working gap and the size of the ferromagnetic iron particles, on polishing forces and surface roughness was also analyzed. It was observed that the polishing forces varied considerably with working gap. Also, the iron particle size was found to have a strong relation to the rate at which the surface roughness decreased. Surface area roughness of 2–3 nm was achieved.

AFM-Based Nanoindentation Process: A Comparative Study

Atomic force microscopy (AFM) has been widely used for nanomachining and fabrication of micro/nanodevices. This paper describes the development and validation of computational models for AFM-based nanomachining. Molecular Dynamics (MD) technique is used to model and simulate mechanical indentation at the nanoscale for different types of materials, including gold, copper, aluminum, and silicon. The simulation allows for the prediction of indentation forces at the interface between an indenter and a substrate. The effects of tip materials on machined surface are investigated. The material deformation and indentation geometry are extracted based on the final locations of the atoms, which have been displaced by the rigid tool. In addition to the modeling, an AFM was used to conduct actual indentation at the nanoscale, and provide measurements to which the MD simulation predictions can be compared. The MD simulation results show that surface and subsurface deformation found in the case of gold, copper and aluminum have the same pattern. However, aluminum has more surface deformation than other materials. Two different types of indenter tips including diamond and silicon tips were used in the model. More surface and subsurface deformation can be observed for the case of nanoindentation with diamond tip. The indentation forces at various depths of indentation were obtained. It can be concluded that indentation force increases as depth of indentation increases. Due to limitations on computational time, the quantitative values of the indentation force obtained from MD simulation are not comparable to the experimental results. However, the increasing trends of indentation force are the same for both simulation and experimental results.

Mixed Lubrication Model for Cold Rolling Considering the Inlet and Deformation Zones

A mixed lubrication model for cold rolling was developed by separating, according to common concepts, the domain of calculation into two zones: the inlet zone and the zone of plastic strip bulk deformation. The analysis of the inlet zone mainly focuses on film formation from different lubricants based on the evolution of layers consisting of neat oil on the metallic surfaces. In the zone of plastic strip bulk deformation, contributions of boundary and hydrodynamic friction are modeled incorporating longitudinal and transversal roughness components. Lubricant pressure, which is influenced by the geometry of these roughness structures, is governed by hydrodynamic mechanisms. Additionally, lubricant temperature in the roll bite is predicted by an integrated thermodynamics sub-model. While coupling between the inlet and plastic deformation zones is performed iteratively, the highly non-linear and coupled equations for the latter zone are solved simultaneously by applying a variant of the well-known damped Newton-Raphson method.