Inductive RF-discharge of low pressure in a magnetic field

2003 ◽  
Author(s):  
A.M. Bystrov ◽  
M.E. Guschin ◽  
A.V. Kostrov ◽  
A.V. Strikovsky ◽  
A.I. Smirnov ◽  
...  
Keyword(s):  
Magnetic Field ◽  
Low Pressure ◽  
Rf Discharge ◽  
Inductive Rf Discharge

Properties of a low-pressure inductive RF discharge II: Mathematical simulations

2007 ◽  
Vol 33 (9) ◽  
pp. 746-756 ◽  
Author(s):  
A. F. Aleksandrov ◽  
K. V. Vavilin ◽  
E. A. Kral’kina ◽  
V. B. Pavlov ◽  
A. A. Rukhadze
Keyword(s):  
Low Pressure ◽  
Rf Discharge ◽  
Mathematical Simulations ◽  
Inductive Rf Discharge

Mathematical simulation of a low-pressure capacitive RF discharge in an external radial magnetic field using the KARAT code

2016 ◽  
Vol 61 (11) ◽  
pp. 1603-1608 ◽  
Author(s):  
I. I. Zadiriev ◽  
A. A. Rukhadze ◽  
E. A. Kral’kina ◽  
K. V. Vavilin ◽  
V. B. Pavlov ◽  
...  
Keyword(s):  
Magnetic Field ◽  
Mathematical Simulation ◽  
Low Pressure ◽  
Rf Discharge ◽  
Radial Magnetic Field

Radial inhomogenity of plasma parameters in a low-pressure inductive RF discharge

2014 ◽  
Vol 69 (1) ◽  
pp. 86-91 ◽  
Author(s):  
E. A. Kralkina ◽  
P. A. Nekliudova ◽  
V. B. Pavlov ◽  
K. V. Vavilin ◽  
V. P. Tarakanov
Keyword(s):  
Low Pressure ◽  
Rf Discharge ◽  
Plasma Parameters ◽  
Inductive Rf Discharge

Properties of a low-pressure inductive RF discharge I: Experiment

2007 ◽  
Vol 33 (9) ◽  
pp. 733-745 ◽  
Author(s):  
A. F. Aleksandrov ◽  
K. V. Vavilin ◽  
E. A. Kral’kina ◽  
V. B. Pavlov ◽  
A. A. Rukhadze
Keyword(s):  
Low Pressure ◽  
Rf Discharge ◽  
Inductive Rf Discharge

Plasma parameters in a dual-camera low-power inductive RF discharge with an external magnetic field

2015 ◽  
Vol 70 (6) ◽  
pp. 527-535
Author(s):  
A. K. Petrov ◽  
K. V. Vavilin ◽  
G. P. Kozlov ◽  
E. A. Kralkina ◽  
P. A. Nekliudova ◽  
...  
Keyword(s):  
Magnetic Field ◽  
External Magnetic Field ◽  
Low Power ◽  
Rf Discharge ◽  
Plasma Parameters ◽  
Inductive Rf Discharge

On the analysis of surface free energy of DLC coatings deposited in low pressure RF discharge

2004 ◽  
Vol 54 (S3) ◽  
pp. C877-C882 ◽  
Author(s):  
Z. Navrátil ◽  
V. Buršíková ◽  
P. St’ahel ◽  
M. Šíra ◽  
P. Zvěřina
Keyword(s):  
Free Energy ◽  
Surface Free Energy ◽  
Low Pressure ◽  
Rf Discharge ◽  
Dlc Coatings
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