REDUCTION OF TUNGSTEN PRECURSORS IN INDUCTIVE RF DISCHARGE PLASMA REACTORS

2003 ◽  
Vol 7 (3) ◽  
pp. 357-366
Author(s):  
Jan Janca ◽  
Marek Elias ◽  
Vlastimil Brozek
Keyword(s):  
Discharge Plasma ◽  
Rf Discharge ◽  
Plasma Reactors ◽  
Inductive Rf Discharge

rf discharge plasma conditions in a plasma processing apparatus

Vacuum ◽  
1977 ◽  
Vol 27 (2) ◽  
pp. 65-67 ◽  
Author(s):  
S.M. Ojha
Keyword(s):  
Discharge Plasma ◽  
Plasma Processing ◽  
Rf Discharge

Effect of the RF-discharge plasma treatment of thin polyimide films on water diffusion

2005 ◽  
Vol 39 (3) ◽  
pp. 192-195 ◽  
Author(s):  
S. A. Zhukova ◽  
A. A. Zhukov ◽  
A. I. Drachev
Keyword(s):  
Plasma Treatment ◽  
Discharge Plasma ◽  
Water Diffusion ◽  
Rf Discharge ◽  
Polyimide Films

The Modification of Carbon Included Polyethylene Surface by Plasma Treatment for Metallizing Using a Low Pressure RF Discharge Plasma

2005 ◽  
Vol 8 (1) ◽  
Author(s):  
Jeou-Long Lee ◽  
Chung-Ming Liu ◽  
Kuen Ting ◽  
Wei-Kung Cheng ◽  
Takayoshi Tsuchida ◽  
...  
Keyword(s):  
Surface Roughness ◽  
Contact Angle ◽  
Surface Layer ◽  
Discharge Plasma ◽  
Treatment Time ◽  
Low Pressure ◽  
Rf Discharge ◽  
Nickel Layer ◽  
Good Adhesion ◽  
Polyethylene Surface

AbstractSurface modification of the carbon included polyethylene (semi-conductive PE) surface for metallizing using a low pressure RF discharge plasma has been carried out. The contact angle was used as a measure of the wettability of the PE surface. The roughness and the chemical bondings in PE surface layer were analized by DFM and XPS, respectively. Typical results show that the contact angle decreases from approximately 94° to below 10° after several minutes' treatment and recovers to a saturation value when it was put open to the air after treatment. The saturation value of the contact angle is smaller as the gas pressure for treatment is higher and the treatment time is longer but all are below approximately 60° which is still smaller than that of untreated. DFM and XPS results show that the surface roughness and the bondings C-O and C=O in the PE surface layer also increase with increasing the treatment time and seem to be responsible for improving the hydrophilic property of PE. After pretreatment process, nickel was coated on the PE sheet by electrodeposition method and a good adhesion between the nickel layer and the PE surface compared with that of untreated was obtained.

Sheath measurement in rf-discharge plasma with dust grains

2001 ◽  
Vol 287 (1-2) ◽  
pp. 125-130 ◽  
Author(s):  
A.A Samarian ◽  
B.W James
Keyword(s):  
Discharge Plasma ◽  
Rf Discharge ◽  
Dust Grains

A simple analysis of an inductive RF discharge

1992 ◽  
Vol 1 (3) ◽  
pp. 179-186 ◽  
Author(s):  
R B Piejak ◽  
V A Godyak ◽  
B M Alexandrovich
Keyword(s):  
Rf Discharge ◽  
Simple Analysis ◽  
Inductive Rf Discharge

A-Si:H TFTs Fabricated with Gated rf-discharge Plasma-CVD Technology

1993 ◽  
Author(s):  
Kazushige Takechi ◽  
Hiroyuki Uchida ◽  
Hiroshi Hayama Akira Kodama ◽  
Yoshimi Watabe
Keyword(s):  
Discharge Plasma ◽  
Rf Discharge ◽  
Plasma Cvd

Positive Ions in RF Discharge Plasma of CF4Gas in a Planar Diode

1996 ◽  
Vol 35 (Part 1, No. 7) ◽  
pp. 4081-4082 ◽  
Author(s):  
Itsuo Ishikawa ◽  
Shinya Sasaki ◽  
Kazuya Nagaseki ◽  
Yukinori Saito ◽  
Shinji Suganomata
Keyword(s):  
Discharge Plasma ◽  
Rf Discharge ◽  
Planar Diode ◽  
Positive Ions
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