Properties of a low-pressure inductive RF discharge II: Mathematical simulations

2007 ◽  
Vol 33 (9) ◽  
pp. 746-756 ◽  
Author(s):  
A. F. Aleksandrov ◽  
K. V. Vavilin ◽  
E. A. Kral’kina ◽  
V. B. Pavlov ◽  
A. A. Rukhadze
Author(s):  
A.M. Bystrov ◽  
M.E. Guschin ◽  
A.V. Kostrov ◽  
A.V. Strikovsky ◽  
A.I. Smirnov ◽  
...  

2014 ◽  
Vol 69 (1) ◽  
pp. 86-91 ◽  
Author(s):  
E. A. Kralkina ◽  
P. A. Nekliudova ◽  
V. B. Pavlov ◽  
K. V. Vavilin ◽  
V. P. Tarakanov

2007 ◽  
Vol 33 (9) ◽  
pp. 733-745 ◽  
Author(s):  
A. F. Aleksandrov ◽  
K. V. Vavilin ◽  
E. A. Kral’kina ◽  
V. B. Pavlov ◽  
A. A. Rukhadze

2004 ◽  
Vol 54 (S3) ◽  
pp. C877-C882 ◽  
Author(s):  
Z. Navrátil ◽  
V. Buršíková ◽  
P. St’ahel ◽  
M. Šíra ◽  
P. Zvěřina

2005 ◽  
Vol 8 (1) ◽  
Author(s):  
Jeou-Long Lee ◽  
Chung-Ming Liu ◽  
Kuen Ting ◽  
Wei-Kung Cheng ◽  
Takayoshi Tsuchida ◽  
...  

AbstractSurface modification of the carbon included polyethylene (semi-conductive PE) surface for metallizing using a low pressure RF discharge plasma has been carried out. The contact angle was used as a measure of the wettability of the PE surface. The roughness and the chemical bondings in PE surface layer were analized by DFM and XPS, respectively. Typical results show that the contact angle decreases from approximately 94° to below 10° after several minutes' treatment and recovers to a saturation value when it was put open to the air after treatment. The saturation value of the contact angle is smaller as the gas pressure for treatment is higher and the treatment time is longer but all are below approximately 60° which is still smaller than that of untreated. DFM and XPS results show that the surface roughness and the bondings C-O and C=O in the PE surface layer also increase with increasing the treatment time and seem to be responsible for improving the hydrophilic property of PE. After pretreatment process, nickel was coated on the PE sheet by electrodeposition method and a good adhesion between the nickel layer and the PE surface compared with that of untreated was obtained.


2019 ◽  
Vol 13 (27) ◽  
pp. 76-82
Author(s):  
Kadhim A. Aadim

Low-pressure capacitively coupled RF discharge Ar plasma has been studied using Langmuir probe. The electron temperature, electron density and Debay length were calculated under different pressures and electrode gap. In this work the RF Langmuir probe is designed using 4MHz filter as compensation circuit and I-V probe characteristic have been investigated. The pressure varied from 0.07 mbar to 0.1 mbar while electrode gap varied from 2-5 cm. The plasma was generated using power supply at 4MHz frequency with power 300 W. The flowmeter is used to control Argon gas flow in the range of 600 standard cubic centimeters per minute (sccm). The electron temperature drops slowly with pressure and it's gradually decreased when expanding the electrode gap. As the gas pressure increases, the plasma density rises slightly at low gas pressure while it drops little at higher gas pressure. The electron density decreases rapidly with expand distances between electrodes.


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