In this paper, we demonstrate Lead zirconate titanate (PZT) nanofibers as a transducer to generate and detect ultrasound acoustic waves. PZT nanofibers with average diameter of 102nm were fabricated by the electrospinning method. The as-fabricated nanofibers were collected and aligned across a 10 μm silicon trench with Au electrodes. After annealing, the device was tested with the pulse/delay method. Two resonant frequencies, 8 MHz and 13MHz, were detected respectively. By using the Hamilton’s principle for coupled electromechanical systems with properly assumed mode shape, the resonant frequency was caudated. Base on the current testing result, a broadband ultrasound transducer was envisioned.
Improvement of Sensitivity of Capacitive Micromachined Ultrasound Transducer
