We consider an integrated electro-absorption modulator within a coupled-cavity VCSEL structure (EAM-VCSEL). We derive expressions for the modulation transfer function (MTF) of the EAM-VCSEL for small-signal modulation of either VCSEL injection current or EAM losses. For current modulation, the cut-off frequency remains limited by relaxation oscillation frequency. For EAM loss modulation, the MTF curve is much flatter and its shape around the relaxation oscillation frequency displays either a well-pronounced maximum, both a maximum and a minimum or a sharp minimum only depending on the bias point of the EAM losses. Such features have been found experimentally in Marigo-Lombart et al., J. Physiscs: Photonics, 1, 2019, but remained unexplained hitherto. Furthermore, the cut-off frequency remains beyond 100 GHz for moderate and week coupling between the VCSEL and EAM cavities. Such ultrahigh bandwidth modulation is due to the fact that the changes of EAM impact much less the optical power distribution along the EAM-VCSEL and, consequently, the confinement factor and photon density in the VCSEL cavity. The three cases of strong, intermediate and weak coupling are also considered when carrying out the large-signal modulation response of the EAM-VCSEL and a clear open-eye diagram is demonstrated at 100 Gbs for an optimal EAM cavity length.
Achieving beyond-100-GHz large-signal modulation bandwidth in hybrid silicon photonics Mach Zehnder modulators using thin film lithium niobate
