Fabrication of 24-MHz-Disk Resonators With Silicon Passive Integration Technology

2010 ◽  
Vol 31 (1) ◽  
pp. 23-25 ◽  
Author(s):  
M. Sworowski ◽  
F. Neuilly ◽  
B. Legrand ◽  
A. Summanwar ◽  
P. Philippe ◽  
...  
1999 ◽  
Author(s):  
Peter Buneman ◽  
S. Davidson ◽  
V. Tannen

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