Fabrication of 24-MHz-Disk Resonators With Silicon Passive Integration Technology
2010 ◽
Vol 31
(1)
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pp. 23-25
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1999 ◽
2020 ◽
Vol 1697
◽
pp. 012148
2021 ◽
Vol 651
(3)
◽
pp. 032081
2003 ◽
Vol 11
(1)
◽
pp. 44-54
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