High-Q and low-Rm 24-MHz radial-contour mode disk resonators fabricated with silicon passive integration technology

2009 ◽  
Author(s):  
M. Sworowski ◽  
F. Neuilly ◽  
B. Legrand ◽  
A. Summanwar ◽  
F. Lallemand ◽  
...  
Keyword(s):  
Integration Technology ◽  
High Q ◽  
Disk Resonators ◽  
Contour Mode

High-Q UHF micromechanical radial-contour mode disk resonators

2005 ◽  
Vol 14 (6) ◽  
pp. 1298-1310 ◽  
Author(s):  
J.R. Clark ◽  
W.-T. Hsu ◽  
M.A. Abdelmoneum ◽  
C.T.-C. Nguyen
Keyword(s):  
High Q ◽  
Disk Resonators ◽  
Contour Mode

Fabrication of 24-MHz-Disk Resonators With Silicon Passive Integration Technology

2010 ◽  
Vol 31 (1) ◽  
pp. 23-25 ◽  
Author(s):  
M. Sworowski ◽  
F. Neuilly ◽  
B. Legrand ◽  
A. Summanwar ◽  
P. Philippe ◽  
...  
Keyword(s):  
Integration Technology ◽  
Disk Resonators

A new approach for the design of low velocity coupling for ring shape anchored contour mode disk resonators

2012 ◽  
Vol 18 (12) ◽  
pp. 2003-2016 ◽  
Author(s):  
Masoud Baghelani ◽  
Habib Badri Ghavifekr ◽  
Afshin Ebrahimi
Keyword(s):  
Low Velocity ◽  
New Approach ◽  
Disk Resonators ◽  
Ring Shape ◽  
Contour Mode

Waveguide coupler for high-Q LiNbO3 disk resonators

2007 ◽  
Author(s):  
Kiyotaka Sasagawa ◽  
Shinya Nakajima ◽  
Tetsuya Kawanishi ◽  
Masahiro Tsuchiya
Keyword(s):  
Waveguide Coupler ◽  
High Q ◽  
Disk Resonators
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