Characterization of Nanoparticles for Nanomaterial Environmental Health and Safety Studies: The Physics and Metrology for Several Common Approaches

2020 ◽  
Vol 14 (5) ◽  
pp. 7-22
Author(s):  
Richard J. Matyi ◽  
Robert I. MacCuspie
2015 ◽  
Vol 2 (3) ◽  
pp. 227-244 ◽  
Author(s):  
David Speed ◽  
Paul Westerhoff ◽  
Reyes Sierra-Alvarez ◽  
Rockford Draper ◽  
Paul Pantano ◽  
...  

This tutorial review focuses on aqueous slurries of dispersed engineered nanoparticles (ENPs) used in chemical mechanical planarization (CMP) for polishing wafers during manufacturing of semiconductors.


Nanoscale ◽  
2015 ◽  
Vol 7 (47) ◽  
pp. 20042-20054 ◽  
Author(s):  
Supriya Ravichandran ◽  
Mark A. Sullivan ◽  
Linda M. Callahan ◽  
Karen L. Bentley ◽  
Lisa A. DeLouise

The increasing use of nanoparticles (NPs) in technological applications and in commercial products has escalated environmental health and safety concerns.


2011 ◽  
Vol 13 (4) ◽  
pp. 1373-1387 ◽  
Author(s):  
Jing Wang ◽  
Christof Asbach ◽  
Heinz Fissan ◽  
Tim Hülser ◽  
Thomas A. J. Kuhlbusch ◽  
...  

Sign in / Sign up

Export Citation Format

Share Document