Model-based temperature control of heated plates

2010 ◽  
Author(s):  
J. L. Ebert ◽  
G. W. van der Linden ◽  
D. de Roover ◽  
L. L. Porter ◽  
R. L. Kosut ◽  
...  
Keyword(s):  
Temperature Control ◽  
Model Based ◽  
Heated Plates

scholarly journals An adaptive model-based feedforward temperature control of a 100 kW PEM electrolyzer

2022 ◽  
Vol 120 ◽  
pp. 104992
Author(s):  
R. Keller ◽  
E. Rauls ◽  
M. Hehemann ◽  
M. Müller ◽  
M. Carmo
Keyword(s):  
Temperature Control ◽  
Adaptive Model ◽  
Model Based ◽  
Pem Electrolyzer

scholarly journals A Reference-Model-Based Artificial Neural Network Approach for a Temperature Control System

Processes ◽  
2020 ◽  
Vol 8 (1) ◽  
pp. 50
Author(s):  
Song Xu ◽  
Seiji Hashimoto ◽  
YuQi Jiang ◽  
Katsutoshi Izaki ◽  
Takeshi Kihara ◽  
...  
Keyword(s):  
Control System ◽  
Temperature Control ◽  
Digital Signal Processor ◽  
Reference Model ◽  
Learning Performance ◽  
Temperature Control System ◽  
Neural Network Approach ◽  
Model Based ◽  
Artificial Neural ◽  
Self Learning

Artificial neural networks (ANNs), which have excellent self-learning performance, have been applied to various applications, such as target detection and industrial control. In this paper, a reference-model-based ANN controller with integral-proportional-derivative (I-PD) compensation has been proposed for temperature control systems. To improve the ANN self-learning efficiency, a reference model is introduced for providing the teaching signal for the ANN. System simulations were carried out in the MATLAB/SIMULINK environment and experiments were carried out on a digital-signal-processor (DSP)-based experimental platform. The simulation and experimental results were compared with those for a conventional I-PD control system. The effectiveness of the proposed method was verified.

Model Based Temperature Control in RTP Yielding ±0.1 °C accuracy on A 1000 °C, 2 second, 100 °C/s Spike Anneal

1998 ◽  
Vol 525 ◽  
Author(s):  
Peter Vandenabeele ◽  
Wayne Renken
Keyword(s):  
Differential Equations ◽  
Temperature Control ◽  
Control Method ◽  
Nonlinear Differential Equations ◽  
System Response ◽  
Model Based Control ◽  
First Order ◽  
Model Based ◽  
Measured System ◽  
Spike Anneal

ABSTRACTA Model Based Control method is presented for accurate control of RTP systems. The model uses 4 states: lamp filament temperature, wafer temperature, quartz temperature and TC temperature. A set of 4 first order, nonlinear differential equations describes the model. Feedback is achieved by updating the model, based on a comparison between actual (measured) system response and modeled system response.

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