2010 18th International Conference on Advanced Thermal Processing of Semiconductors (RTP)
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9781424484003
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Model-based temperature control of heated plates

2010 ◽  
Author(s):  
J. L. Ebert ◽  
G. W. van der Linden ◽  
D. de Roover ◽  
L. L. Porter ◽  
R. L. Kosut ◽  
...  
Keyword(s):  
Temperature Control ◽  
Model Based ◽  
Heated Plates

Activation of silicon wafer by excimer laser

2010 ◽  
Author(s):  
Rainer Paetzel ◽  
Jan Brune ◽  
Frank Simon ◽  
Ludolf Herbst ◽  
Masashi Machida ◽  
...  
Keyword(s):  
Silicon Wafer ◽  
Excimer Laser

Impact of laser anneal thermal budget on the quality of thin SiGe channels with a high Ge content

2010 ◽  
Author(s):  
Erik Rosseel ◽  
Andriy Hikavyy ◽  
Jean-Luc Everaert ◽  
Liesbeth Witters ◽  
Jerome Mitard ◽  
...  
Keyword(s):  
Thermal Budget ◽  
Laser Anneal

Optimization of implant and anneal processes

2010 ◽  
Author(s):  
S. Prussin ◽  
J. Reyes ◽  
H. Onoda ◽  
N. Hamamoto ◽  
T. Nagayama ◽  
...  

A novel hydrogen rich interfacial layer to downscale high-K dielectrics

2010 ◽  
Author(s):  
Shao Wei Wang ◽  
Y.R. Wang ◽  
Charles CL Lin ◽  
Frank CC Huang ◽  
Michael Chan ◽  
...  
Keyword(s):  
Interfacial Layer ◽  
High K
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