3D hetero-integration technology with backside TSV and reliability challenges

Author(s):  
Kang-Wook Lee ◽  
M. Murugesan ◽  
T. Fukushima ◽  
T. Tanaka ◽  
M. Koyanagi
1999 ◽  
Author(s):  
Peter Buneman ◽  
S. Davidson ◽  
V. Tannen

2014 ◽  
Vol 61 ◽  
pp. 365-368 ◽  
Author(s):  
Chunfeng Song ◽  
Yasuki Kansha ◽  
Masanori Ishizuka ◽  
Qian Fu ◽  
Atsushi Tsutsumi

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