Continuous Cellular Automaton for the simulation of the surface morphology on any silicon orientation Si{HKL} in anisotropic etching
2009 ◽
Vol 20
(1)
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pp. 015019
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2007 ◽
Vol 17
(4)
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pp. S38-S49
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Keyword(s):
2011 ◽
Vol 21
(6)
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pp. 065017
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2007 ◽
Vol 9
(12)
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pp. 436-436
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2008 ◽
Vol 17
(2)
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pp. 410-431
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1982 ◽
Vol 40
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pp. 224-225
1972 ◽
Vol 30
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pp. 448-449