Piezoelectric-on-silicon Lorentz force magnetometers based on radial contour mode disk resonators

2018 ◽  
Vol 281 ◽  
pp. 185-195 ◽  
Author(s):  
S. Ghosh ◽  
J. E.-Y. Lee
Keyword(s):  
Lorentz Force ◽  
Disk Resonators ◽  
Contour Mode

A new approach for the design of low velocity coupling for ring shape anchored contour mode disk resonators

2012 ◽  
Vol 18 (12) ◽  
pp. 2003-2016 ◽  
Author(s):  
Masoud Baghelani ◽  
Habib Badri Ghavifekr ◽  
Afshin Ebrahimi
Keyword(s):  
Low Velocity ◽  
New Approach ◽  
Disk Resonators ◽  
Ring Shape ◽  
Contour Mode

Anchor Loss Calculation for Ring Shape Anchored Contour Mode Disk Resonators

2018 ◽  
Vol 23 (No 3, September 2018) ◽  
pp. 321-326
Author(s):  
Masoud Baghelani
Keyword(s):  
Quality Factor ◽  
Rf Mems ◽  
Loss Mechanism ◽  
Disk Resonators ◽  
Ring Shape ◽  
Mems Resonators ◽  
Acceptable Quality ◽  
Resonance Frequencies ◽  
Contour Mode ◽  
Anchor Loss

Miniaturization is the most sophisticated method for achieving UHF and SHF resonance frequencies in RF MEMS resonators. However, by reducing the dimensions of the resonators, the size of their supports become more comparable with the size of the resonator and anchor loss becomes the dominant loss mechanism, thereby suppressing the quality factor. This study considers, Ring Shape Anchored Contour Mode Disk Resonator and calculates anchor loss effects using both energy loss and acoustic impedance ratio methods. Results of analytical calculations are verified using finite element harmonic analysis. Simulation results show that RSACMDRs have an acceptable quality factor in comparison with the other state-of-the-art resonators.

High-Q UHF micromechanical radial-contour mode disk resonators

2005 ◽  
Vol 14 (6) ◽  
pp. 1298-1310 ◽  
Author(s):  
J.R. Clark ◽  
W.-T. Hsu ◽  
M.A. Abdelmoneum ◽  
C.T.-C. Nguyen
Keyword(s):  
High Q ◽  
Disk Resonators ◽  
Contour Mode
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