Limiting current-type MEMS oxygen gas sensor integrated with micro-hotplate
2000 ◽
Vol 71
(3)
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pp. 1500-1504
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2002 ◽
Vol 82
(1)
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pp. 34-39
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1995 ◽
Vol 30
(11)
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pp. 1351-1357
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2012 ◽
Vol 404
(10)
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pp. 2851-2858
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2003 ◽
Vol 94
(2)
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pp. 222-227
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