Low-Pressure Helicon-Plasma Discharge Initiation via Magnetic Field Ramping

2009 ◽  
Vol 37 (11) ◽  
pp. 2110-2115 ◽  
Author(s):  
M. Wiebold ◽  
He Ren ◽  
C.M. Denning ◽  
J.E. Scharer
Keyword(s):  
Magnetic Field ◽  
Low Pressure ◽  
Plasma Discharge ◽  
Helicon Plasma

Helicon Plasma Discharge in a Toroidal Magnetic Field of the Tokamak

2011 ◽  
Vol 39 (11) ◽  
pp. 3103-3107 ◽  
Author(s):  
C. G. Jin ◽  
T. Yu ◽  
Y. Zhao ◽  
Y. Bo ◽  
C. Ye ◽  
...  
Keyword(s):  
Magnetic Field ◽  
Plasma Discharge ◽  
Toroidal Magnetic Field ◽  
Helicon Plasma

Investigation of Low-Pressure Plane Plasma Discharge

2002 ◽  
Vol 10 (4) ◽  
pp. 251-261 ◽  
Author(s):  
G. Golan ◽  
A. Axelevitch ◽  
B. Sigalov ◽  
B. Gorenstein
Keyword(s):  
Low Pressure ◽  
Plasma Discharge ◽  
Plane Plasma

Transport of a helicon plasma by a convergent magnetic field for high speed and compact plasma etching

2014 ◽  
Vol 47 (42) ◽  
pp. 425201 ◽  
Author(s):  
Kazunori Takahashi ◽  
Taisei Motomura ◽  
Akira Ando ◽  
Yuji Kasashima ◽  
Kazuya Kikunaga ◽  
...  
Keyword(s):  
Magnetic Field ◽  
Plasma Etching ◽  
High Speed ◽  
Helicon Plasma

scholarly journals Studies of the helicon plasma source with inhomogeneous magnetic field

2016 ◽  
Author(s):  
I. V. Shikhvotsev ◽  
V. I. Davydenko ◽  
A. A. Ivanov ◽  
I. A. Kotelnikov ◽  
E. I. Kuzmin ◽  
...  
Keyword(s):  
Magnetic Field ◽  
Plasma Source ◽  
Inhomogeneous Magnetic Field ◽  
Helicon Plasma

The application of magnetic field at low pressure for optimal laser-induced plasma spectroscopy

2015 ◽  
Vol 110 ◽  
pp. 7-12 ◽  
Author(s):  
Dae-Hyoung Kim ◽  
Yong H. Kihm ◽  
Soo-Jin Choi ◽  
Jae-Jun Choi ◽  
Jack J. Yoh
Keyword(s):  
Magnetic Field ◽  
Low Pressure ◽  
Plasma Spectroscopy ◽  
Laser Induced Plasma
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