Scheduling of Single-Arm Multi-cluster Tools With Wafer Residency Time Constraints in Semiconductor Manufacturing

2015 ◽  
Vol 28 (1) ◽  
pp. 117-125 ◽  
Author(s):  
QingHua Zhu ◽  
NaiQi Wu ◽  
Yan Qiao ◽  
MengChu Zhou
Keyword(s):  
Semiconductor Manufacturing ◽  
Time Constraints ◽  
Cluster Tools ◽  
Residency Time

scholarly journals Scheduling of Single-Arm Cluster Tools with Residency Time Constraints and Chamber Cleaning Operations

2021 ◽  
Vol 11 (19) ◽  
pp. 9193
Author(s):  
Jie Li ◽  
Yan Qiao ◽  
Siwei Zhang ◽  
Zhiwu Li ◽  
Naiqi Wu ◽  
...  
Keyword(s):  
Semiconductor Manufacturing ◽  
Time Constraints ◽  
Scheduling Problem ◽  
Cyclic Schedule ◽  
Cleaning Operation ◽  
Cluster Tools ◽  
Efficiency And Effectiveness ◽  
Novel Method ◽  
Loading Sequence ◽  
Residency Time

To ensure wafer quality, engineers have to impose wafer residency time constraints and chamber cleaning operations on cluster tools; this has been widely used in semiconductor manufacturing. Wafer residency time constraints and chamber cleaning operations make the scheduling problem of cluster tools more challenging. This work aims to solve such a scheduling problem for single-arm cluster tools and presents a novel method based on the use of virtual wafers. Under a one-cyclic schedule obtained for single-arm cluster tools without chamber cleaning requirements, virtual wafers are loaded into the tool such that when a process module (PM) processes virtual wafers, a chamber cleaning operation is performed in practice. The key to solve this scheduling problem is to find a wafer loading sequence with the highest performance in terms of cycle time. With this idea, this work constructs a genetic algorithm to search for such a solution. Since the obtained solution is a periodical wafer loading sequence based on a one-wafer cyclic schedule, it can be easily implemented. Therefore, this work has high practical value to numerous semiconductor manufacturers. Experiments were performed to show the efficiency and effectiveness of the proposed method.

scholarly journals Scheduling dual-arm cluster tools with multiple wafer types and residency time constraints

2020 ◽  
Vol 7 (3) ◽  
pp. 776-789 ◽  
Author(s):  
Jipeng Wang ◽  
Hesuan Hu ◽  
Chunrong Pan ◽  
Yuan Zhou ◽  
Liang Li
Keyword(s):  
Time Constraints ◽  
Cluster Tools ◽  
Dual Arm ◽  
Residency Time
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