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2015 ◽  
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pp. 528-544 ◽  
Author(s):  
Sumika Arima ◽  
Akihiro Kobayashi ◽  
Yi-Fan Wang ◽  
Kazuho Sakurai ◽  
Yusuke Monma
Keyword(s):  
Semiconductor Manufacturing ◽  
Batch Processes ◽  
Time Constraints

Health Index Extraction Methods for Batch Processes in Semiconductor Manufacturing

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Vol 28 (3) ◽  
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Author(s):  
Thi-Bich-Lien Nguyen ◽  
Mohand A. Djeziri ◽  
Bouchra Ananou ◽  
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Jacques Pinaton
Keyword(s):  
Semiconductor Manufacturing ◽  
Extraction Methods ◽  
Batch Processes ◽  
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Vol 44 (1) ◽  
pp. 14079-14084
Author(s):  
Zhiqiang Ge ◽  
Junhua Zheng ◽  
Zhihuan Song ◽  
Huaping Dai
Keyword(s):  
Semiconductor Manufacturing ◽  
Batch Processes ◽  
Statistical Monitoring ◽  
Complex Semiconductor
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