Closing-Down Optimization for Single-Arm Cluster Tools Subject to Wafer Residency Time Constraints

2020 ◽  
pp. 1-16 ◽  
Author(s):  
Yan Qiao ◽  
MengChu Zhou ◽  
NaiQi Wu ◽  
ZhiWu Li ◽  
QingHua Zhu
Keyword(s):  
Time Constraints ◽  
Cluster Tools ◽  
Residency Time

scholarly journals Scheduling dual-arm cluster tools with multiple wafer types and residency time constraints

2020 ◽  
Vol 7 (3) ◽  
pp. 776-789 ◽  
Author(s):  
Jipeng Wang ◽  
Hesuan Hu ◽  
Chunrong Pan ◽  
Yuan Zhou ◽  
Liang Li
Keyword(s):  
Time Constraints ◽  
Cluster Tools ◽  
Dual Arm ◽  
Residency Time
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