Enhanced piezoelectric properties of c-axis textured aluminium scandium nitride thin films with high scandium content: Influence of intrinsic stress and sputtering parameters
Keyword(s):
Keyword(s):
2018 ◽
Vol 343
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pp. 2-6
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Keyword(s):
Optimization of the annealing process and nanoscale piezoelectric properties of (002) AlN thin films
2017 ◽
Vol 28
(13)
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pp. 9295-9300
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Keyword(s):
2013 ◽
Vol 52
(40)
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pp. 14328-14334
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2016 ◽
Vol 688
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pp. 863-867
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2015 ◽
Vol 35
(7)
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pp. 2041-2049
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