Enhanced piezoelectric properties of c-axis textured aluminium scandium nitride thin films with high scandium content: Influence of intrinsic stress and sputtering parameters

2017 ◽  
Author(s):  
Stefan Mertin ◽  
Vladimir Pashchenko ◽  
Fazel Parsapour ◽  
Clemens Nyffeler ◽  
Cosmin S. Sandu ◽  
...  
Keyword(s):  
Thin Films ◽  
Piezoelectric Properties ◽  
Intrinsic Stress ◽  
Scandium Nitride ◽  
Scandium Content

Piezoelectric and structural properties of c-axis textured aluminium scandium nitride thin films up to high scandium content

2018 ◽  
Vol 343 ◽  
pp. 2-6 ◽  
Author(s):  
Stefan Mertin ◽  
Bernd Heinz ◽  
Oliver Rattunde ◽  
Gabriel Christmann ◽  
Marc-Alexandre Dubois ◽  
...  
Keyword(s):  
Thin Films ◽  
Structural Properties ◽  
Scandium Nitride ◽  
Scandium Content

Growth and piezoelectric properties of amorphous and crystalline (K1−xNax)NbO3−based thin films

2021 ◽  
Author(s):  
Jong-Un Woo ◽  
Sun-Woo Kim ◽  
Dae-Su Kim ◽  
In-Su Kim ◽  
Ho-Sung Shin ◽  
...  
Keyword(s):  
Thin Films ◽  
Piezoelectric Properties

Optimization of the annealing process and nanoscale piezoelectric properties of (002) AlN thin films

2017 ◽  
Vol 28 (13) ◽  
pp. 9295-9300 ◽  
Author(s):  
Bangran Fu ◽  
Fang Wang ◽  
Rongrong Cao ◽  
Yemei Han ◽  
Yinping Miao ◽  
...  
Keyword(s):  
Thin Films ◽  
Piezoelectric Properties ◽  
Annealing Process

scholarly journals Correlation between nanomechanical and piezoelectric properties of thin films: An experimental and finite element study

2013 ◽  
Vol 90 ◽  
pp. 148-151 ◽  
Author(s):  
Hussein Nili ◽  
Guang Cheng ◽  
T.A. Venkatesh ◽  
Sharath Sriram ◽  
Madhu Bhaskaran
Keyword(s):  
Thin Films ◽  
Finite Element ◽  
Piezoelectric Properties ◽  
Finite Element Study ◽  
Element Study

Characterization of Nanomechanical, Ferroelectric, and Piezoelectric Properties by Nanoindentation and Piezoresponse Force Microscopy of PbTiO3 Thin Films

2013 ◽  
Vol 52 (40) ◽  
pp. 14328-14334 ◽  
Author(s):  
Juan Ramos-Cano ◽  
Mario Miki-Yoshida ◽  
André Marino Gonçalves ◽  
José Antônio Eiras ◽  
Jesús González-Hernández ◽  
...  
Keyword(s):  
Thin Films ◽  
Piezoelectric Properties ◽  
Piezoresponse Force Microscopy ◽  
Force Microscopy ◽  
Ferroelectric And Piezoelectric Properties

LaNiO3 seed layer induced enhancement of piezoelectric properties in (100)-oriented (1−x)BZT–xBCT thin films

2015 ◽  
Vol 35 (7) ◽  
pp. 2041-2049 ◽  
Author(s):  
W.L. Li ◽  
T.D. Zhang ◽  
D. Xu ◽  
Y.F. Hou ◽  
W.P. Cao ◽  
...  
Keyword(s):  
Thin Films ◽  
Seed Layer ◽  
Piezoelectric Properties
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